PLD-Fabricated Isotropic Pr–Fe–B Film Magnets Deposited on Glass Substrates

Yamashita, Akihiro; Hirotaki, K.; Kurosaki, A.; Yanai, Takeshi; Fukunaga, H.; Fujiwara, Ryo; Shinshi, Tadahiko; Nakano, Masaki

doi:10.1109/tmag.2016.2633362

Cited by 4 publications

(2 citation statements)

References 29 publications

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“…The magnetic properties were comparable to those of a 104-μm-thick Pr-Fe-B film deposited on a glass substrate (H cj : 960 kA m −1 ; J r : 0.7 T; (BH) max : 70 kJ m −3 ). 32) Moreover, we compared the magnetic properties between the 127-μm-thick Pr-Fe-B film and a Nd-Fe-B film with a maximum thickness of 92 μm on Si substrates with a glass buffer layer (see Fig. 7).…”

Section: Resultsmentioning

confidence: 99%

Comparison of properties between Pr–Fe–B and Nd–Fe–B thick-film magnets applied to MEMS

Nakano

Takeichi

Yamaguchi

et al. 2019

Jpn. J. Appl. Phys.

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We investigated the possibility of R (Nd or Pr)-Fe-B thick-film magnets applied to MEMS. First, an enhancement in the thickness of the Si oxide layer on a Si substrate enabled us to increase the adhesion force between the Si substrate and Nd-Fe-B film. Then, after depositing a glass buffer layer on the Si substrate to obtain a thicker Si oxide layer, we compared the mechanical characteristics and magnetic properties of both Pr-Fe-B and Nd-Fe-B films. As the thickness of the glass buffer layer increased, the thickness of the Pr-Fe-B film could be enhanced without mechanical destruction. We had difficulty in exceeding the thickness of 100 μm in Nd-Fe-B films. Moreover, the (BH) max value of a 127-μm-thick Pr-Fe-B film was higher by approximately 30 kJ m −3 than that of a 92-μm-thick Nd-Fe-B film. The obtained results suggest that a Pr-Fe-B thick-film magnet is more suitable for MEMS applications.

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Section: Resultsmentioning

confidence: 99%

Comparison of properties between Pr–Fe–B and Nd–Fe–B thick-film magnets applied to MEMS

Nakano

Takeichi

Yamaguchi

et al. 2019

Jpn. J. Appl. Phys.

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“…Our group has proposed magnetic films that are thicker than several microns and applied them to miniaturized devices together with microelectromechanical system processes. [16][17][18][19][20][21][22] We then synthesized magnetic metal (or magnetic metal compound) laminated films with over 100 (approximately 10 μm in thickness) layers via pulsed laser deposition (PLD) using rotating composite targets, namely, Nd-Fe-B/α-Fe, 23,24) Sm-Co/α-Fe 25,26) and Pr-Fe-B/α-Fe. 27) Motivated by the above mentioned advances related to metal-ceramic laminated films, we prepare metal-ceramic multilayer thick-films in the present study.…”

Section: Introductionmentioning

confidence: 99%

Formation of Fe–Co/glass multilayer films via pulsed laser deposition

Nakano¹,

Itakura²,

Kaku³

et al. 2022

Jpn. J. Appl. Phys.

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Sputtering-made magnetic thin films with metal-ceramic multilayer structures have been reported to achieve excellent magnetic properties and/or new functions for various magnetic materials. However, sputtering-made magnetic films tend to have 10 or fewer layers because main applications of thin films, such as magnetic sensors, recording heads and recording media, require thin films thinner than 1 μm. This paper reports an Fe-Co/ glass multilayer thick-film that has approximate thickness of 10 μm (above 100 layers). This thick-film was prepared via pulsed laser deposition using several composite targets (two- or three-layer target) consisting of an Fe-Co alloy (or Fe-Co sheet) and a glass plate. The fabrication of an Fe-Co single-layer film and a glass single-layer film was examined to determine the optimal defocus rate for the composite target. Then, we confirmed that the use of a [glass plate]/[Fe-Co alloy] two-layer target enabled the local formation of a [20 nm-thick Fe-Co]/[10 nm-thick glass) laminated structure with approximately 130 layers. An Fe-Co/glass multilayer structure was formed by using a three-layer target of a [Fe-Co sheet]/[glass plate]/[metal alloy]. Nonetheless, the results also suggest that large glass droplets should be removed in future work to create homogeneous multilayer thick-films.

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Magnetic properties of Pr-Fe-B thick-film magnets deposited on Si substrates with glass buffer layer

et al. 2018

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In order to improve the magnetic properties of PLD-made Pr-Fe-B thick-film magnets deposited on Si substrates, an adoption of a glass buffer layer was carried out. The glass layer could be fabricated under the deposition rate of approximately 70 μm/h on a Si substrate using a Nd-YAG pulse laser in the vacuum atmosphere. The use of the layer enabled us to reduce the Pr content without a mechanical destruction and enhance (BH)max value by approximately 20 kJ/m3 compared with the average value of non-buffer layered Pr-Fe-B films with almost the same thickness. It is also considered that the layer is also effective to apply a micro magnetization to the films deposited on Si ones.

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PLD-Fabricated Isotropic Pr–Fe–B Film Magnets Deposited on Glass Substrates

Cited by 4 publications

References 29 publications

Comparison of properties between Pr–Fe–B and Nd–Fe–B thick-film magnets applied to MEMS

Comparison of properties between Pr–Fe–B and Nd–Fe–B thick-film magnets applied to MEMS

Formation of Fe–Co/glass multilayer films via pulsed laser deposition

Magnetic properties of Pr-Fe-B thick-film magnets deposited on Si substrates with glass buffer layer

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