Polarization gratings for the DUV: modeling and experimental results

Triebel, Peter; Mademann, D.; Schrenk, Manfred; Weissbrodt, Peter

doi:10.1117/12.598724

Cited by 1 publication

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“…There are different optical materials, systems or structures that are able to polarize light. Using high resolution e-beam lithography, diffractive polarizers for wavelengths down to the UV can be fabricated with excellent optical properties [3]. A further advantage of these diffractive polarizers is the possibility to arrange them in arrays of facets because of the flexibility of the used technology.…”

Section: Polarizing Beam Shaping Elementmentioning

confidence: 99%

Combined elements for beam shaping and polarization management

Cumme¹,

Triebel²,

Mademann³

et al. 2005

SPIE Proceedings

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Micro and nano optics enable the control of light for producing intensity distributions with given profiles, propagation properties and polarization states. The higher the requirements on the optical function, the more complicated will be its realizing with a single element surface or a single element class. Combinations of refractive and diffractive, both diffractive or sub-wavelength structures with each other give the ability to link the advantages of different element classes or different element functions for realizing the optical functionality. In the paper we discuss two different examples of combinations for DUV applications. In detail we present a diffractive -diffractive beam homogenizer with NA of 0.3 that show no zero order. A binary phase grating for polarization control combined with a beam shaping element will be presented. The polarized order of this grating shows an efficiency of about 90% with a degree of polarization better than 90%. Wave optical and rigorous design strategies and simulations as well as the optical measurements will be discussed for the given examples.

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Section: Polarizing Beam Shaping Elementmentioning

confidence: 99%