Polarization-independent InP Arrayed Waveguide Grating Filter Using Deep Ridge Waveguide Structure

Kobayashi, Masaki; Sanjo, Hiroaki; Oku, S.; Kadota, Y.; Yoshikuni, Y.

doi:10.1109/cleopr.1997.610982

Cited by 23 publications

(13 citation statements)

References 3 publications

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“…Similar to the Michelson interferometer, the spectrum can be extracted by Fourier transform. Another derivative of the Mach–Zehnder interferometer is the arrayed waveguide grating (AWG) [ 20 , 21 , 22 , 23 , 24 , 25 , 26 ]. The AWG is a key component in optical dense wavelength division multiplex (DWDM) components used in present optical communication systems.…”

Section: Introductionmentioning

confidence: 99%

“…These components are also known as phased arrays. Pioneering work on AWGs for optical communication in the 1.55 µm communication band was done by Y. Yoshikuni et al, revealing 50 GHz channel spacings [ 21 , 22 , 23 ]. The AWG has M waveguides (also called channel waveguides) of identical effective refractive index but of different physical lengths.…”

Section: Introductionmentioning

confidence: 99%

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Role of Nanoimprint Lithography for Strongly Miniaturized Optical Spectrometers

et al. 2021

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Optical spectrometers and sensors have gained enormous importance in metrology and information technology, frequently involving the question of size, resolution, sensitivity, spectral range, efficiency, reliability, and cost. Nanomaterials and nanotechnological fabrication technologies have huge potential to enable an optimization between these demands, which in some cases are counteracting each other. This paper focuses on the visible and near infrared spectral range and on five types of optical sensors (optical spectrometers): classical grating-based miniaturized spectrometers, arrayed waveguide grating devices, static Fabry–Pérot (FP) filter arrays on sensor arrays, tunable microelectromechanical systems (MEMS) FP filter arrays, and MEMS tunable photonic crystal filters. The comparison between this selection of concepts concentrates on (i) linewidth and resolution, (ii) required space for a selected spectral range, (iii) efficiency in using available light, and (iv) potential of nanoimprint for cost reduction and yield increase. The main part of this review deals with our own results in the field of static FP filter arrays and MEMS tunable FP filter arrays. In addition, technology for efficiency boosting to get more of the available light is demonstrated.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Role of Nanoimprint Lithography for Strongly Miniaturized Optical Spectrometers

et al. 2021

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“…The nondoped InP buffer layer is inserted above the waveguide layer to reduce the absorption loss in the p-type InP. The 2.5-um-wide, 4.5-Mm-deep ridge waveguide, which was designed to obtain low polarization dependence [25][26], was etched using Br2IN2 reactive ion beam etching [27]. As the light is strongly confined by air in the lateral direction, a small bending radius is allowed in the waveguide layout without excess loss.…”

Section: Monolithically Integrated Wdm Channel Selectormentioning

confidence: 99%

<title>Semiconductor photonic devices for WDM applications</title>

Tohmori

2001

SPIE Proceedings

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“…The excess loss of the AWG is caused by inconsistencies in the field distribution of the array waveguides and slab waveguide. Excess loss values of 0.4 [20] to 2.8 dB [13,21] have been obtained by specially designing the connection regions or by optimizing the arrayed waveguide structure. These excess losses are comparable to those of silica-based AWGs.…”

Section: Reduction Of Insertion Lossmentioning

confidence: 99%

“…The raised-strip waveguide [11] birefringence. In contrast, the deep-ridge waveguide [12,13] can be either thick or thin. By selecting a thin (0.3 to 0.5 Pm thick) waveguide core, integration with other devices becomes easy because the spotsize and thickness of the core layer are similar to those of the usual semiconductor laser diodes.…”

Section: Polarization-insensitive Awg and Selection Of Waveguide Strumentioning

confidence: 99%

Semiconductor arrayed waveguide gratings for integrated photonics devices

Kobayashi

2000

Electron. Comm. Jpn. Pt. II

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Advances in wavelength division multiplexing (WDM) technology have made the arrayed waveguide grating (AWG) indispensable in the multi/demultiplexing of WDM signals. Semiconductor‐based AWGs are small, and can be monolithically integrated with semiconductor lasers, photodiodes, and so on. Channel crosstalk of less than –30 dB has been demonstrated, and many highly functional and compact integrated devices for WDM systems have been developed. This paper surveys recent research on semiconductor‐based AWGs. © 2000 Scripta Technica, Electron Comm Jpn Pt 2, 83(8): 18–26, 2000

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Polarization-independent InP Arrayed Waveguide Grating Filter Using Deep Ridge Waveguide Structure

Cited by 23 publications

References 3 publications

Role of Nanoimprint Lithography for Strongly Miniaturized Optical Spectrometers

Role of Nanoimprint Lithography for Strongly Miniaturized Optical Spectrometers

<title>Semiconductor photonic devices for WDM applications</title>

Semiconductor arrayed waveguide gratings for integrated photonics devices

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