Polycrystalline PZT film on porous Ti substrate synthesized by Ultrasonic Assisted Hydrothermal Method

Abstract

The hydrothermal method utilizes a solution-based chemical reaction to synthesize piezoelectric films. We proposed an ultrasonic irradiation during the hydrothermal synthesis, named an Ultrasonic Assisted Hydrothermal Method (UAHTM).In this study, two topics are reported, the optimum ultrasonic irradiation period for getting thicker PZT film and the PZT deposition on porous Ti substrate by UAHTM.