2003
DOI: 10.1088/0960-1317/14/3/002
|View full text |Cite
|
Sign up to set email alerts
|

Polyimide microfluidic devices with integrated nanoporous filtration areas manufactured by micromachining and ion track technology

Abstract: This paper reports on polyimide microfluidic devices fabricated by photolithography and a layer transfer lamination technology. The microchannels are sealed by laminating an uncured polyimide film on a partially cured layer and subsequent imidization. Selected areas of the microchannels were irradiated with heavy ions of several hundred MeV and the generated ion tracks are chemically etched to submicron pores of high aspect ratio. The ion beam parameters and the track etching conditions define density, length,… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
5

Citation Types

0
47
0

Year Published

2007
2007
2023
2023

Publication Types

Select...
8
1
1

Relationship

0
10

Authors

Journals

citations
Cited by 77 publications
(47 citation statements)
references
References 21 publications
0
47
0
Order By: Relevance
“…Various microconcentrators working with membrane structures have been reported, such as inorganic microfiltration membranes using laser interference lithography (Kuiper et al 1998), ultrafiltration membrane by micro-stereo lithography (MSL) process (Ikuta et al 1999), polyimide nanoporous filtration membrane using ion-tracking technology and subsequent chemical etching (Metz et al 2004) and microstructured membrane (Irimia and Toner 2006). However, owing to the existence of 'dead-ends' in such membrane-based microfilters or microconcentrators with the penetrating flow in the same direction as the main flow, combined with the deformability and adhesion of the cells, clogging failure is inevitable (Dong et al 2009.…”
Section: Introductionmentioning
confidence: 99%
“…Various microconcentrators working with membrane structures have been reported, such as inorganic microfiltration membranes using laser interference lithography (Kuiper et al 1998), ultrafiltration membrane by micro-stereo lithography (MSL) process (Ikuta et al 1999), polyimide nanoporous filtration membrane using ion-tracking technology and subsequent chemical etching (Metz et al 2004) and microstructured membrane (Irimia and Toner 2006). However, owing to the existence of 'dead-ends' in such membrane-based microfilters or microconcentrators with the penetrating flow in the same direction as the main flow, combined with the deformability and adhesion of the cells, clogging failure is inevitable (Dong et al 2009.…”
Section: Introductionmentioning
confidence: 99%
“…Although used in numerous scientific and technological fields (Spohr, 1980;Metz et al, 2004;Reber et al, 1999;Yoshida et al, 1997), filtration is probably one of the most popular applications. Over the many years, pore fabrication was extended to different polymer materials and the size of the pores became smaller and smaller.…”
Section: Introductionmentioning
confidence: 99%
“…Furthermore, these devices had very small filter areas that restrain the flow rates. On-chip filters can also be made by irradiating a designated area with heavy ions to generate sub-micrometer pores (Metz et al 2004). Although compatible with common chip fabrication methods and effective in retaining microbes, this method requires heavy-ion accelerators which are not easily accessible to general researchers.…”
Section: Introductionmentioning
confidence: 99%