Polymer Coated Capacitive Microintegrated Gas Sensor

Steiner, F.-P.; Hierlemann, Andreas; Cornila, C.; Noetzel, Gerd; Bachtold, M.; Korvink, Jan G.; Göpel, Wolfgang; Baltes, H.

doi:10.1109/sensor.1995.721963

Cited by 28 publications

(28 citation statements)

References 2 publications

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“…For a layer thickness less than half the periodicity of the electrodes, the capacitance would always increase regardless of analyte dielectric constant. This consistent behavior supported earlier simulations by these authors [54] and suggested a criterion for discriminating between different analytes. The authors reported a detection limit of 5 ppm for ethanol and 8 ppm for toluene vapors for the chemicapacitor elements of the microsystem, with a response time for the sensor of a few seconds.…”

Section: Ide Chemicapacitor Voc Sensorssupporting

confidence: 91%

Chemicapacitors as a versatile platform for miniature gas and vapor sensors

Blue¹,

Uttamchandani²

2016

Meas. Sci. Technol.

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Recent years have seen the rapid growth in the need for sensors throughout all areas of society including environmental sensing, health-care, public safety and manufacturing quality control. To meet this diverse need, sensors have to evolve from specialized and bespoke systems to miniaturized, low-power, lowcost (almost disposable) ubiquitous platforms. A technology that has been developed which gives a route to meet these challenges is the chemicapacitor sensor. To date the commercialization of these sensors has largely been restricted to humidity sensing, but in this review we examine the progress over recent years to expand this sensing technology to a wide range of gases and vapors. From sensors interrogated with laboratory instrumentation, chemicapacitor sensors have evolved into miniaturized units integrated with low power readout electronics that can selectively detect target molecules to ppm and sub-ppm levels within vapor mixtures.

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Section: Ide Chemicapacitor Voc Sensorssupporting

confidence: 91%

Chemicapacitors as a versatile platform for miniature gas and vapor sensors

Blue¹,

Uttamchandani²

2016

Meas. Sci. Technol.

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“…If the dielectric constant of the polymer is lower than that of the analyte, the capacitance will be increased, and, if the polymer dielectric constant is larger than that of the analyte, the capacitance will be decreased. This effect has been previously detailed and supported by simulations [36][37][38]. For thick polymer layers the sensitivity, S, is the change in capacitance, C, in dependence of the change in the analyte concentration, c A , as given by:…”

Section: Capacitive Sensor Array and Readout Circuitrymentioning

confidence: 72%

Monolithic CMOS multi-transducer gas sensor microsystem for organic and inorganic analytes

Li¹,

Vancura²,

Barrettino³

et al. 2007

Sensors and Actuators B: Chemical

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“…Two effects change the capacitance of, eg, a polymeric sensitive layer upon absorption of an analyte: (i) swelling and (ii) change of the dielectric constant due to incorporation of the analyte molecules into the polymer matrix [23,72,73]. Interdigitated electrode structures are predominantly used for capacitance measurements [74,75].…”

Section: Chemocapacitorsmentioning

confidence: 99%

“…More recent applications also include the detection of VOCs in the gas phase using polymeric layers [23,72,73].…”

Section: Chemocapacitorsmentioning

confidence: 99%

CMOS Single Chip Gas Detection Systems — Part I

et al. 2002

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The current trend to control indoor air-quality and to monitor environmental pollution has created a strong demand for miniaturized and inexpensive gas sensors for volatile organic compounds (VOCs). Gas sensor arrays based on industrial CMOS-processes combined with post-CMOS micromachining (CMOS MEMS) are a promising approach to low-cost sensor devices. In this article, the state of research of CMOS-based gas sensor systems is reviewed, and a platform technology is described, which provides the possibility of monolithically integrating several different transducers on a single chip. A design environment, batch-fabrication processes, and fast testing procedures were developed to realize an example single-chip gas detection system. The chip includes the transducers, their biasing circuitry, reference elements, a digital interface, and a temperature sensor. The three polymer-based transducers and their interface electronics will be detailed in the second part of this article [1].

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Polymer Coated Capacitive Microintegrated Gas Sensor

Cited by 28 publications

References 2 publications

Chemicapacitors as a versatile platform for miniature gas and vapor sensors

Chemicapacitors as a versatile platform for miniature gas and vapor sensors

Monolithic CMOS multi-transducer gas sensor microsystem for organic and inorganic analytes

CMOS Single Chip Gas Detection Systems — Part I

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