2019
DOI: 10.1021/acs.jpca.9b06056
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Polymer Patterning with Self-Heating Atomic Force Microscope Probes

Abstract: Scanning probe-assisted patterning methods already demonstrated a high degree of capabilities on submicrometer scales. However, the throughput is still far from its potential because of complexity or fragility of the probes for exploiting thermal effects, chemical reactions, and voltage-induced processes in various patterning operations. Here, we present a new approach to thermomechanical patterning by implementing a multitasking atomic force microscopy (AFM) probe: the functionalized planar probes. In this me… Show more

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Cited by 5 publications
(6 citation statements)
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“…In parallel we observed a similar resurgence of nanofabricated STM probes [19][20][21] that can be equipped with two (fixed) probes that are compatible with ultrahigh vacuum and low-temperature operation and potentially allow the integration in ultrastable single-tip STM systems currently available [21]. Advances in modern nanofabrication techniques such as focused ion beam milling and electron beam induced deposition could lead to a tip separation of a few tens of nanometers in the very near future.…”
Section: Introductionmentioning
confidence: 71%
“…In parallel we observed a similar resurgence of nanofabricated STM probes [19][20][21] that can be equipped with two (fixed) probes that are compatible with ultrahigh vacuum and low-temperature operation and potentially allow the integration in ultrastable single-tip STM systems currently available [21]. Advances in modern nanofabrication techniques such as focused ion beam milling and electron beam induced deposition could lead to a tip separation of a few tens of nanometers in the very near future.…”
Section: Introductionmentioning
confidence: 71%
“…In parallel we observe a similar resurgence of nanofabricated STM probes [19][20][21] that can be equipped with two (fixed) probes that are compatible with ultra high vacuum and low temperature operation and potentially allow the integration in ultra-stable single tip STM systems currently available [21]. Advances in modern nanofrabrication techniques such as focussed ion beam milling or electron beam induced deposition could lead to a tip separation of a few tens of nanometers in the very near future.…”
Section: Introductionmentioning
confidence: 72%
“…1b was taken before the FIB step. Such a device can act as a single-tip device or potentially be used to perform tip preparation through heating by running a current between the contacts, as suggested by Ciftci et al 32 . Figure 1c, d shows the apices of two tips from the front under a 52°angle and from the top, respectively.…”
Section: Resultsmentioning
confidence: 99%
“…1b is taken before the FIB step. Such a device can act as single tip device or potentially be used to perform tip preparation through heating by running a current between the contacts, as suggested by [32].…”
Section: Resultsmentioning
confidence: 99%