Polymer tapered waveguides and flip-chip solder bonding as compatible technologies for efficient OEIC coupling

Goodwill, Dominic; Fan, R.S.; Hooker, R. Brian; Lee, Yung-Cheng; McComas, B.L.; Mickelson, Alan; Morozova, Nina D.; Tomic, Darja

doi:10.1109/ectc.1997.606260

Cited by 3 publications

(2 citation statements)

References 21 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The two guiding layers are then patterned using different masks. This is very hard to do using semiconductors, since it involves two mask, etch and regrowth steps and various resists and etches have to be applied to and cleaned from the intermediate surfaces [20]. In this study, Tsung-Hung Lin, Hsiharng Yang , Ruey Fang Shyu, and Ching-Kong Chao NEW HORIZONTAL FRUSTUM OPTICAL WAVEGUIDE FABRICATION USING … the fabrication of horizontal hemi-frustum optical waveguides is proposed here to provide a novel method.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

New horizontal frustum optical waveguide fabrication using UV proximity printing

et al. 2008

View full text Add to dashboard Cite

This paper presents a novel method to fabricate the horizontal frustum structure as a planar optical waveguide by using the proximity printing technique. A horizontal frustum optical waveguide with a both lateral and vertical taper structure was produced. The orthogonal and inclined masks with the diffraction effect were employed in lithography process. This method can precisely control each horizontal frustum optical waveguide geometric profile in the fabrication process. The horizontal frustum optical waveguide and its array with the same inclined angle were generated. The beam propagation simulation software (BPM_CAD) was used to modeling the optical performance. The simulation results reveal that the mode profile matched into horizontal frustum optical waveguide and fiber from the laser diode. The optical loss of horizontal hemi-frustum structure of optical waveguides was less than 0.2dB. The horizontal hemifrustum waveguide will be used for fiber coupling on boards for further optical communication systems.

show abstract

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%