Polymeric micro-cantilever array for auditory front-end processing

Xu, Tao; Bachman, Mark; Zeng, Fan‐Gang; Li, G.P.

doi:10.1016/j.sna.2003.11.035

Cited by 44 publications

(29 citation statements)

References 9 publications

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“…Some of current MEMS devices are designed as an array of microcantilevers [11,12] which are not suitable for sensing ambient acoustic pressure like the human cochlea. The micro-membrane represents a much more promising shape of resonator for this purpose.…”

Section: Cochlear Implantmentioning

confidence: 99%

Model-based design of artificial zero power cochlear implant

et al. 2015

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Section: Cochlear Implantmentioning

confidence: 99%

Model-based design of artificial zero power cochlear implant

et al. 2015

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“…We have built and tested two versions of this device. One used optical readout [Xu et al, 2004], the second used capacitive readout.…”

Section: Micromachined Multiband Transducermentioning

confidence: 99%

“…Fabrication methods included using UV patternable high-definition epoxy (SU-8), performing laser machining on polymer fi lms, and performing microinjection molding. The details of the injection molding manufacturing process which produced the results presented here, have been detailed elsewhere [Xu et al, 2004].…”

Section: Micromachined Multiband Transducermentioning

confidence: 99%

Micromechanical Resonator Array for an Implantable Bionic Ear

Bachman¹,

Zeng²,

Xu³

et al. 2006

Audiol Neurotol

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In this paper we report on a multiresonant transducer that may be used to replace a traditional speech processor in cochlear implant applications. The transducer, made from an array of micromachined polymer resonators, is capable of passively splitting sound into its frequency sub-bands without the need for analog-to-digital conversion and subsequent digital processing. Since all bands are mechanically filtered in parallel, there is low latency in the output signals. The simplicity of the device, high channel capability, low power requirements, and small form factor (less than 1 cm) make it a good candidate for a completely implantable bionic ear device.

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“…While single cantilevers provide a way to create devices, the use of dual cantilevers has been pioneered by Park et al as a way of attracting cells to adhere to a cantilever, whereon they can be cultured and weighed using a resonance frequency method [3]. In another example of this geometry Xu et al fabricated dual cantilevers in polymer, which also served as waveguides, in a device that functioned as an acoustic sensor [4].…”

Section: Introductionmentioning

confidence: 99%

Integrated optical dual-cantilever arrays in silica on silicon

Cooper¹,

Carpenter²,

Mennea³

et al. 2014

Opt. Express

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A dual cantilever device has been demonstrated which can operate as a force sensor or variable attenuator. The device is fabricated using physical micromachining techniques that do not require cleanroom class facilities. The response of the device to mechanical actuation is measured, and shown to be well described by conventional fiber optic angular misalignment theory. The device has the potential to be utilized within integrated optical components for sensors or attenuators. An array of devices was fabricated with potential for parallel operation.

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Polymeric micro-cantilever array for auditory front-end processing

Cited by 44 publications

References 9 publications

Model-based design of artificial zero power cochlear implant

Model-based design of artificial zero power cochlear implant

Micromechanical Resonator Array for an Implantable Bionic Ear

Integrated optical dual-cantilever arrays in silica on silicon

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