Polytetrafluoroethylene processing characteristics using high-energy X-ray

Ukita, Yoshiaki; Kanda, Kazuhiro; Matsui, Shinji; Kishihara, Mitsuyoshi; Utsumi, Yuichi

doi:10.1007/s00542-008-0578-3

Microsyst Technol

2008

DOI: 10.1007/s00542-008-0578-3

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Polytetrafluoroethylene processing characteristics using high-energy X-ray

Yoshiaki Ukita

Kazuhiro Kanda

Shinji Matsui

et al.

Abstract: Polytetrafluoroethylene (PTFE) microstructures' processing characteristics using X-ray photo dcomposition and desorption are studied in the highest energy region (2 keV to [12 keV). While the exposed surface states are seen melting and boiling from the remaining bubble structure of the irradiated surface, basic photochemistry of PTFE is also same as previous reports and high-aspect ratio structures are successfully formed. We developed new Ni stencil electroformed stencil masks and successfully fabricated firs… Show more

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“…First, no current method can conveniently generate micropatterns in PFA and FEP (17). Reported micropattern techniques such as X-ray lithography, electroplating, and molding (18), synchrotron radiation (19), and ion beam writing (20) are either too expensive or require serial processing. Because PFA and FEP are melt-processible, microfeatures can be transferred into them with thermo molding using micropatterned masters in silicon, glass, and metals (21)(22)(23).…”

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Whole-Teflon microfluidic chips

Ren

Dai

Zhou

et al. 2011

Proc. Natl. Acad. Sci. U.S.A.

200

187

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Although microfluidics has shown exciting potential, its broad applications are significantly limited by drawbacks of the materials used to make them. In this work, we present a convenient strategy for fabricating whole-Teflon microfluidic chips with integrated valves that show outstanding inertness to various chemicals and extreme resistance against all solvents. Compared with other microfluidic materials [e.g., poly(dimethylsiloxane) (PDMS)] the whole-Teflon chip has a few more advantages, such as no absorption of small molecules, little adsorption of biomolecules onto channel walls, and no leaching of residue molecules from the material bulk into the solution in the channel. Various biological cells have been cultured in the whole-Teflon channel. Adherent cells can attach to the channel bottom, spread, and proliferate well in the channels (with similar proliferation rate to the cells in PDMS channels with the same dimensions). The moderately good gas permeability of the Teflon materials makes it suitable to culture cells inside the microchannels for a long time.microchips | on-chip cell culture | solvent resistive chip T his report describes a convenient method for the fabrication of whole-Teflon microfluidic chips; we also integrate microvalves into the chips and demonstrate a few key applications of the whole-Teflon microfluidic chips with various organic solvents and biomolecules, and for culturing biological cells.Microfluidics (1) emerged during the early 1990s with channel networks in silicon or glass. Microprocessing of these materials is labor-intensive and time-consuming, it requires sophisticated equipment in a clean room, and often involves hazardous chemicals. The subsequent use of poly(dimethylsiloxane) (PDMS) greatly simplified the fabrication of microchips (2) and led to the rapid development of the field. PDMS has other attractive properties, such as being elastic (easy to make efficient microvalves), permeable to gases, and compatible with culturing biological cells. Despite these advantages, applications of PDMS chips are severely limited by a few drawbacks that are inherent to this material: (i) strong adsorption of molecules, particularly large biomolecules, onto its surface (3); (ii) absorption of nonpolar and weakly polar molecules into PDMS bulk; (iii) leaching of small molecules from PDMS bulk into solutions; and (iv) incompatibility with organic solvents. Therefore, special attention must be paid when quantitative analysis is needed (materials lost on channel walls and into the PDMS bulk) or organic solvents are involved. Because many drug molecules are small with relatively low polarity and cells can be very sensitive to their environment, data interpretation requires particular caution when cell-based drug screening and cell culturing are performed on PDMS microchips. Various techniques (4-8) have been proposed to modify PDMS bulk and surface properties, but they normally complicate the fabrication and still cannot effectively solve the problems. Most other plastics (9-11) have simi...

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mentioning

confidence: 99%

Whole-Teflon microfluidic chips

Ren

Dai

Zhou

et al. 2011

Proc. Natl. Acad. Sci. U.S.A.

200

187

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Application of proton beam writing for the direct etching of polytetrafluoroethylene for polydimethylsiloxane replica molding

Nishikawa¹,

Hozumi²

2013

Journal of Vacuum Science & Technology B, Nanotechnology an

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Fabrication of curved structures with electron-beam and surface structure characterizationA direct etching phenomenon of polytetrafluoroethylene (PTFE) is reported via 1.0 MeV proton beam writing. With a fluence level of more than 0.9 lC/mm 2 , direct etching of the PTFE is observed using a scanning electron microscope. The decrease of CF 2 and CF 3 bonds in the PTFE composition is also observed using Fourier-transform infrared analysis, which indicates that the decomposition of the PTFE is involved in the direct etching process. With increasing proton beam fluence levels up to 9.6 lC/mm 2 , the depth of the micromachining increases to around 55 lm, which is larger than the predicted range of 16.5 lm for 1.0 MeV protons incident on PTFE. Coupled with heat treatments in vacuum or in air at temperatures of more than 200 C, holes with smooth sidewalls and a smooth bottom surface are obtained. Polydimethylsiloxane replication of square patterns down to 5 lm wide and with a height of 16 lm has been demonstrated. This direct PTFE etching technique may open new possibilities for micromachining PTFE molds by proton beam writing for polydimethylsiloxane replica molding.

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Polytetrafluoroethylene processing characteristics using high-energy X-ray

Cited by 2 publications

References 11 publications

Whole-Teflon microfluidic chips

Whole-Teflon microfluidic chips

Application of proton beam writing for the direct etching of polytetrafluoroethylene for polydimethylsiloxane replica molding

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