2021
DOI: 10.1016/j.sna.2020.112486
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Porous silicon membranes and their applications: Recent advances

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Cited by 47 publications
(20 citation statements)
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“…Another approach to increase the sensitivity of PSi biosensor is the fabrication of PSi membranes (PSiMs). Instead of a close-ended PSi layer over which the analyte must flow, an open-ended PSi membrane allows the analyte to flow through the porous matrix [32]. PSi membranes have been fabricated as early as the 1990s [33], but the interest in PSiMs for sensing applications only arose recently [34][35][36][37][38].…”
Section: Introductionmentioning
confidence: 99%
“…Another approach to increase the sensitivity of PSi biosensor is the fabrication of PSi membranes (PSiMs). Instead of a close-ended PSi layer over which the analyte must flow, an open-ended PSi membrane allows the analyte to flow through the porous matrix [32]. PSi membranes have been fabricated as early as the 1990s [33], but the interest in PSiMs for sensing applications only arose recently [34][35][36][37][38].…”
Section: Introductionmentioning
confidence: 99%
“…The X-ray Diffraction for same solution in figure (5), From this figure, the porous silicon signal can be observed very clearly, and that was at 15 minutes, As for the 20 minutes, the formation of a new porous layer started after removing the formed layer at 15 minutes, So this shape close to the bulk silicon because a new etching process is taking place at this moment 19 One can notice this in figure (6).…”
Section: Resultsmentioning
confidence: 75%
“…The silicon wafer was cutting into dimensions (1.5*1.4)cm. These pieces were laundering with ethanol to remove dirt by mixture ethanol and HF acid (10%) by utilizing the systematic -figure (1)makes porous silicon with electro chemical etching for p-type bulk silicon with different time (5,10,15,20,25 and 30) min, and the last solution is HNO 3 and salt. After that, The sample is quickly rinsed with ionized water and let to air-dry for a few minutes.…”
Section: Materials and Methodologymentioning
confidence: 99%
“…An important aspect for gas microsensors is the possibility to create integrated structures based on porous silicon, which contain a gas-transport and a gas-sensitive layers separated by a dielectric layer of silicon dioxide [11,12]. This paper shows the possibility to create a test structure of a flow-type resistive gas sensor based on macroporous silicon layers, which comprises integrated gas-permeable and gassensitive layers.…”
Section: Introductionmentioning
confidence: 99%