Positioning To Nanometer Resolution With Ultrasonic Actuators

Snitka, Valentinas; Zukauskas, D.; Mizariene, Vida

doi:10.1109/sensor.1995.717222

Cited by 6 publications

(2 citation statements)

References 5 publications

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“…Miscellaneous approaches utilized self-tuning discrete-time control, sliding mode control, genetic algorithm, neural network methods, and so on to deal with the time-varying parameters from nonlinearity and disturbance so as to preserve high-precision positioning while operating with piezoelectric motors. [9][10][11] Therefore, building a suitable robust controller for such a timevarying system is demanding. EWMA algorithm is one of the most basic run-to-run (RtR) control schemes widely used for monitoring and tracking small changes in the volatility.…”

Section: Introductionmentioning

confidence: 99%

Design and performance evaluation of an exponentially weighted moving average–based adaptive control for piezo-driven motion platform

Ting

Nguyen

Chen

2018

Advances in Mechanical Engineering

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In this article, building a controlled system with velocity feedback in the inner loop for a platform driven by piezoelectric motors is investigated. Such a motion control system is subject to disturbance such as friction, preload, and temperature rise in operation. Especially, temperature rise is an essential problem of using piezoelectric motor, but very few research works address this topic in depth. Exponentially weighted moving average method has been widely used in process control to deal with systematic change and drift disturbance. It is attempted to map the exponentially weighted moving average method and the predictor corrector control with two exponentially weighted moving average formulas into a run-to-run model reference adaptive system for velocity control. Using a predictive friction model, a dead-zone compensator is built that can reduce the friction effect and provide an approximately linear relation of the input voltage and the output velocity for the subsequent exponentially weighted moving average or predictor corrector control control design. Comparison of the exponentially weighted moving average, predictor corrector control, and proportional-integral-derivative controllers is carried out in experiment with different speed patterns on a single-axis and a bi-axial platform. The results indicate that the proposed run-to-run-model reference adaptive system predictor corrector control is superior to the other methods.

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Section: Introductionmentioning

confidence: 99%

Design and performance evaluation of an exponentially weighted moving average–based adaptive control for piezo-driven motion platform

Ting

Nguyen

Chen

2018

Advances in Mechanical Engineering

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“…Hence, how to cope with those time-varying parameters in order to increase the robustness against environmental changes is demanding. For instance, Snita et al used a simple predictor-based self-tuning control in discrete time to deal with internal and external disturbances [8]. Wai and Tu designed a double-inductance double-capacitance inverter and sliding-mode fuzzy-neural-network control without dynamic model to achieve the objective of tracking various trajectories [9].…”

Section: Introductionmentioning

confidence: 99%

Internal Model Control using EWMA for speed control of wedge-type piezoelectric motors

Ting

Hou

et al. 2009

2008 IEEE International Conference on Robotics and Biomimetics

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In this article, speed control for a platform driven by a wedge-type piezoelectric motor is investigated. Such a motion control system is subject to disturbance like friction, preload and operating temperature change, so that a predictive linear relation between the applied input voltage and the output platform velocity is difficult to keep. Especially, operating temperature change is an essential problem of using piezoelectric motor, but very few researches introduce the phenomenon in depth and solve the problem. In practical experiment, deterministic drift due to operating temperature change is found and defined as a ramp-function disturbance. Similar to Chemical Mechanical Polishing (CMP) in semiconductor manufacturing process with a linear relation between the input recipe and the output target in a Run-to-Run (RtR) control structure, Exponentially Weighted Moving Average (EWMA) method has been widely used and verified its capability of overcoming systematic change and drift disturbance. Therefore, EWMA method on the basis of RtR control structure is considered to use for speed control purpose. Besides that, it is attempted to map the EWMA method into an Internal Model Control (IMC) to achieve an RtR-IMC adaptive control scheme. Following that, adding a PI compensator in the feedforward path is theoretically proved to be able to deal with the ramp-type disturbance due to operating temperature change. A number of feedback control methods including Single EWMA, Double EWMA, and RtR-IMC_EWMA with a PI compensator design are investigated and examined. From experimental results, Double EWMA with two-stage parameter estimation, as expected, is able to deal with the drift noise and outperforms Single EWMA. The proposed RtR-IMC_EWMA with a PI compensator is superior to other methods. Such a new adaptive control scheme is easy to establish and provides flexibility of adding compensator in the feedforward path to enhance the robustness to external disturbance.Index Terms -piezoelectric motor, EWMA method, Internal Model Control.

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Modeling and Experiments of Input-Output Displacement Relations for a Piezoelectric Nanopositioner

Lin

Sun

2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)

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Positioning To Nanometer Resolution With Ultrasonic Actuators

Cited by 6 publications

References 5 publications

Design and performance evaluation of an exponentially weighted moving average–based adaptive control for piezo-driven motion platform

Design and performance evaluation of an exponentially weighted moving average–based adaptive control for piezo-driven motion platform

Internal Model Control using EWMA for speed control of wedge-type piezoelectric motors

Modeling and Experiments of Input-Output Displacement Relations for a Piezoelectric Nanopositioner

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