Post-discharge study of laser-triggered vacuum discharge for highly repetitive powerful EUV source

Lü, Peng; Kitajima, Seiya; Lim, Soowon; Katsuki, S.; Akiyama, H.

doi:10.1109/ppc.2013.6627705

Cited by 3 publications

(3 citation statements)

References 1 publication

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“…The Z-pinch usually appears during the current peak when a plasma column forms. [32] At this moment, the plasma in the gap comes comes from the current ablation of cathode, the temperature and density of plasma are both relatively high, the distribution of plasma is more uniform and the radius of plasma column is larger, thus the formation of pinch requires higher current (about 10 kA). A larger plasma zone can satisfy the relationship: P m > P t , a 'needle' zone forms.…”

Section: Discussionmentioning

confidence: 99%

Micro-pinch formation and extreme ultraviolet emission of laser-induced discharge plasma*

Wang

Zuo

et al. 2021

Chinese Phys. B

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Extreme ultraviolet (EUV) source produced by laser-induced discharge plasma (LDP) is a potential technical means in inspection and metrology. A pulsed Nd:YAG laser is focused on a tin plate to produce an initial plasma thereby triggering a discharge between high-voltage electrodes in a vacuum system. The process of micro-pinch formation during the current rising is recorded by a time-resolved intensified charge couple device camera. The evolution of electron temperature and density of LDP are obtained by optical emission spectrometry. An extreme ultraviolet spectrometer is built up to investigate the EUV spectrum of Sn LDP at 13.5 nm. The laser and discharge parameters such as laser energy, voltage, gap distance, and anode shape can influence the EUV emission.

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Section: Discussionmentioning

confidence: 99%

Micro-pinch formation and extreme ultraviolet emission of laser-induced discharge plasma*

Wang

Zuo

et al. 2021

Chinese Phys. B

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“…16) It was also demonstrated by observation of EUV emission in our previous report. 12) After current stopped at 270 ns, the plasma was still observed for more than 1 µs.…”

Section: Dynamic Evolution Of Ltdppmentioning

confidence: 98%

“…1). 12) In this paper, we report the post-discharge phenomena of our LTDPP source. The experiments are based on the observations of the plasma and droplets at different time interval of two LTDPP using the schlieren method and high-speed camera.…”

Section: Introductionmentioning

confidence: 99%

Optical observations of post-discharge phenomena of laser-triggered discharge produced plasma for EUV lithography

Lim

Kitajima

Lü

et al. 2014

Jpn. J. Appl. Phys.

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This paper reports the dynamic post-discharge phenomena of laser-triggered discharge-produced plasmas (LTDPP) for extreme ultraviolet lithography (EUVL) sources. A pulsed laser was focused on the high-voltage tin cathode surface to form tin vapor jet across a 5 mm long anodecathode gap, which leads to the electrical breakdown. The post-discharge phenomena were observed using both of the Schlieren method and high-speed camera. Schlieren images show the dynamic evolution of the discharge plasma and the development of tin droplets. Visible emission from the plasma lasted for more than 1 µs after the current stopped. The droplets emerged from the cathode approximately 100 µs after discharge and spread throughout the electrodes gap. Various sizes of droplets stagnate in the gap for milliseconds. The subsequent laser pulse and voltage application show an interaction between the droplets and the subsequent discharge. The subsequent laser pulse evaporates not only the cathode surface but also the droplets, which influence the tin vapor distribution in the gap. This uncertain vapor distribution affects the formation process of microplasmas that emit EUV.

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Laser-assisted vacuum arc extreme ultraviolet source: a comparison of picosecond and nanosecond laser triggering

Beyene¹,

Tobin²,

Juschkin³

et al. 2016

J. Phys. D: Appl. Phys.

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Post-discharge study of laser-triggered vacuum discharge for highly repetitive powerful EUV source

Cited by 3 publications

References 1 publication

Micro-pinch formation and extreme ultraviolet emission of laser-induced discharge plasma*

Micro-pinch formation and extreme ultraviolet emission of laser-induced discharge plasma*

Optical observations of post-discharge phenomena of laser-triggered discharge produced plasma for EUV lithography

Laser-assisted vacuum arc extreme ultraviolet source: a comparison of picosecond and nanosecond laser triggering

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