A remarkable enhancement of atomic diffusion is highlighted by scanning tunneling microscopy performed on ultrathin metastable body-centered tetragonal Co films grown on Fe(001). The films follow a nearly perfect layer-by-layer growth mode with a saturation island density strongly dependent on the layer on which the nucleation occurs, indicating a lowering of the diffusion barrier. Density functional theory calculations reveal that this phenomenon is driven by the increasing capability of the film to accommodate large deformations as the thickness approaches the limit at which a structural transition occurs. These results disclose the possibility of tuning surface diffusion dynamics and controlling cluster nucleation and self-organization. DOI: 10.1103/PhysRevLett.113.046102 PACS numbers: 68.43.Jk, 68.55.J-, 81.15.Aa Atomic diffusion on solid surfaces is a ubiquitous phenomenon that plays a fundamental role in determining a large variety of physical and chemical processes. An example is represented by the self-assembly of metallic nanosized clusters stabilized on either oxide or metallic substrates, which is exploited to produce nanopatterned materials in fast and parallel bottom-up approaches [1,2]. In this frame, adatom diffusion is of paramount importance, since the kinetic constraints typically determine the final morphology of the self-assembled nanostructures. In the field of heterogeneous catalysis, adatom diffusion is particularly relevant in cases where spill-over effects intervene and the reaction proceeds through different steps mediated by spatially separated active sites [3][4][5]: an enhanced atomic diffusivity can therefore boost the rate of the chemical reactions. On the other hand, in oxide supported metal clusters, catalysis, sintering due to Ostwald ripening, induced by atoms detaching from smaller clusters and diffusing to larger ones, often leads to catalyst deactivation [6].Various factors have been recognized to influence the diffusivity of atomic species on solid surfaces, for instance, (i) isotropic two-dimensional strain in heteroepitaxial systems, with an in-plane lattice mismatch between the film and the substrate [7,8]; (ii) mesoscopic strain, where the relaxations induced by the already nucleated islands significantly affect atomic motion [9]; (iii) availability of small amounts of foreign atoms (surfactants) that, being adsorbed on the substrate prior to the film deposition, can affect the intra-and/or interlayer mass transport [10-13]; (iv) presence of molecular species (chemisorbed or in the gas phase), such as, for instance, water [3] or CO [14]; and (v) long-range adatom-adatom interactions [15][16][17]. More recently, the enhancement of surface diffusion with acoustic standing waves has been proposed as a method for surface nanostructuring by driving atomic motion [18].In this Letter, we report on a remarkable increase of atomic diffusion with the thickness of an ultrathin metastable film, namely, tetragonally distorted body-centered (bct) Co grown on Fe(001). Previous qu...