Powder-blasting technology as an alternative tool for microfabrication of capillary electrophoresis chips with integrated conductivity sensors

Schlautmann, Stefan; Wensink, H.; Schasfoort, Richardus B.M.; Elwenspoek, Michael Curt; Berg, Albert van den

doi:10.1088/0960-1317/11/4/318

Cited by 111 publications

(99 citation statements)

References 9 publications

(9 reference statements)

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The used photoresist was stripped from the wafer in acetone. Through-holes and deep channels like the gas channel with a depth of 100 m were made using powder blasting [25]. A photosensitive protective foil, Ordyl BF410, was laminated onto the wafer and structured using photolithography and developed in sodium carbonate.…”

Section: A Miniaturized Detection Systemmentioning

confidence: 99%

Selective low concentration ammonia sensing in a microfluidic lab-on-a-chip

et al. 2006

View full text Add to dashboard Cite

Abstract-In the medical community, there is a considerable interest in a diagnostic breath analyzer for ammonia that is selectively enough to measure in exhaled air and small enough for the small volumes available in such an application. An indirect measurement system for low gaseous ammonia concentrations has been miniaturized and integrated on a chip in order to reach this goal. The detection limit of the system was calculated to be 1.1 parts per billion (ppb). The response time was determined to be 1.6 min with a gas flow of 50 ml/min. The required gas volume for one measurement is therefore sufficiently small, although sampling assistance is required for breath analysis. The selectivity of the system is sufficient to measure ammonia concentrations in the low-ppb range. The system is even sufficiently selective to be used in environments that contain elevated carbon dioxide levels, like exhaled air. The lower ammonia concentration expected in diagnostic breath analysis applications, 50 ppb, was demonstrated to be detectable.

show abstract

Section: A Miniaturized Detection Systemmentioning

confidence: 99%

Selective low concentration ammonia sensing in a microfluidic lab-on-a-chip

et al. 2006

View full text Add to dashboard Cite

show abstract

“…With such abrasive techniques, one can achieve high erosion rates; higher than those that can be obtained with conventional dry or wet etching processes such as plasma etching and chemical etching. In the field of microelectromechanical systems (MEMS), powder blasting has already been used for the fabrication of inertial sensors [2], peristaltic micropumps [3] and miniaturized capillary electrophoresis chips [4]. Erosion with sharp particles is also a widely used technique in aerospace and automotive industries.…”

Section: Introductionmentioning

confidence: 99%

Multifractal properties of Pyrex and silicon surfaces blasted with sharp particles

Moktadir¹,

Kraft²,

Wensink³

2008

Physica A: Statistical Mechanics and its Applications

View full text Add to dashboard Cite

The blasting of brittle materials with sharp particles is an important fabrication technology in many industrial processes. In particular, for microsystems, it allows the production of devices with feature sizes down to few tens of microns. An important parameter of this process is the surface roughness of post-blasted surfaces. In this work the scaling properties of Pyrex glass and silicon surfaces after bombardment with alumina particles are investigated. The targets were bombarded at normal incidence using alumina particles with two different average sizes, 29 µm and 9 µm. This investigation indicates that the resulting surfaces are multifractal. Applying multifractal detrended fluctuation analysis (MFDFA) allowed us to determine the singularity spectrum of the surfaces. This spectrum did not depend on the target material or on the size of the particles. Several parameters quantifying relevant quantities were determined. It was found that long range correlations are responsible for the observed multifractal behaviour.

show abstract

“…Powder blasting has been evaluated for structuring microfluidic chips for electrophoresis [9][10][11][12]. It could be shown that such devices can in principal be applied in chip electrophoresis.…”

Section: Introductionmentioning

confidence: 99%

Coating of powder‐blasted channels for high‐performance microchip electrophoresis

et al. 2006

View full text Add to dashboard Cite

Channels in microfluidic glass chips manufactured with the alternative powder blasting technology were permanently coated with poly(vinyl alcohol) (PVA) in order to improve the performance in microchip electrophoresis. The performance of coated and uncoated powder-blasted (pb) devices as well as coated and uncoated wet chemical etched (wc) chips was compared in electrophoretic separations of fluorescently labeled test compounds. The limited electrophoretic resolution obtained in pb-chips could significantly be improved by coating the channels with PVA. The resolution of test compounds in such coated pb-devices was even higher than in uncoated wc-chips. PVA-coated pb-chips could also successfully be applied in chiral separations. While in an uncoated pb-chip using a cyclodextrins buffer only one broad signal was obtained, two well-resolved signals were obtained in a coated device.

show abstract

Powder-blasting technology as an alternative tool for microfabrication of capillary electrophoresis chips with integrated conductivity sensors

Cited by 111 publications

References 9 publications

Selective low concentration ammonia sensing in a microfluidic lab-on-a-chip

Selective low concentration ammonia sensing in a microfluidic lab-on-a-chip

Multifractal properties of Pyrex and silicon surfaces blasted with sharp particles

Coating of powder‐blasted channels for high‐performance microchip electrophoresis

Contact Info

Product

Resources

About