Power Dependence of Aging in SAW Resonators

Shreve, W.R.; Bray, Z.R.C.; Elliott, Scott S.; Chu, Y.C.

doi:10.1109/ultsym.1981.197588

Cited by 45 publications

(12 citation statements)

References 11 publications

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“…Large peak compressional stresses are induced in the devices by driving them with high RF power at resonant frequency. The applied peak compressional stress, due to the dissipated RF power during burn-in is dependent on the resonator's active acoustic cavity length and width [3]. The experiments show a general trend in improvement of resonator Q and a reduction in resonator impedance after performing burn-in.…”

Section: Introductionmentioning

confidence: 85%

Residual noise reduction in AlN resonators by prolonged RF excitation

Nancy

Zaghloul

Piazza

2014

2014 IEEE International Frequency Control Symposium (FCS)

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Very low phase noise oscillators are highly desirable for military radar applications. In order to improve phase noise performance of micro-electro-mechanical-systems (MEMS) oscillators, it is essential to reduce the residual noise of the resonator, which serves as the frequency selective element. The oscillator closed loop phase noise is typically limited by the 1/f flicker noise intrinsic to the MEMS resonator acting as the frequency selective element. In this work, the ability to reduce the 1/f flicker noise and consequently the residual phase noise of 1GHz MEMS aluminum nitride (AlN) contour mode resonators (CMR) by prolonged exposure to RF power at resonant frequency is explored.

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Section: Introductionmentioning

confidence: 85%

Residual noise reduction in AlN resonators by prolonged RF excitation

Nancy

Zaghloul

Piazza

2014

2014 IEEE International Frequency Control Symposium (FCS)

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“…A threshold value of 6x10' F l u 2 has been observed for degradation of pure Aluminum metallization in SAW resonators [26], with associated high downward aging rates.…”

Section: Peak Stress In An Stw Resonatormentioning

confidence: 97%

“…Acoustic metal migration has long been known as a failure mechanism in SAW resonators [26]. In this experiment, a high power oscillator was formed by connecting the resonator in a feedback loop of a Mini-Circuits ZHL-2 power amplifier.…”

Section: High Power Behaviormentioning

confidence: 99%

“…The relevant variable in power-dependent aging of SAW devices is the peak stress (force per unit area) associated with the standing acoustic wave [26]. In a SAW resonator the largest component of stress is the longitudinal stress Tit, where the subscript 1 refers to the propagation direction.…”

Section: Peak Stress In An Stw Resonatormentioning

confidence: 99%

“…Proceeding from equation A7 in [26] we may derive the following equation for STW resonators on 36 degree rot Y quartz, propagation normal to X:…”

Section: Peak Stress In An Stw Resonatormentioning

confidence: 99%

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Novel Surface Transverse Wave Resonators with Low Loss and High Q

Bagwell

Bray

1987

IEEE 1987 Ultrasonics Symposium

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Surface transverse wave (STW) resonator devices have been designed and fabricated on rotated Y cuts of quartz, with wave propagation perpendicular to the X axis.Packaged devices with center frequencies of 500 and 632 MHz show insertion loss less than 6 d B in a 50 ohm system.Unloaded Q is typically greater than 10,000. Devices at 1726 MHz show packaged insertion loss as low as 10 dB and unloaded Q as high as 5600. Temperature behavior was studied. STW resonators were found to exhibit significantly greater power-handling ability than SAW resonators with comparable design parameters and electrical performance in a comparison study.Device phase noise measurements indicate that STW resonators' noise improves when driven with high incident power.Single sideband device phase noise less than -135 dBc/Hz at 1 H z offset was achieved.

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Metal‐migration of aluminum film on SAW resonator

Ebata

Morishita

1984

Electron. Comm. Jpn. Pt. I

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The SAW resonator has been considered as a small‐sized high‐Q resonator in VHF and UHF bands. High‐density energy is therefore stored within the resonator and the study of drive levels is specifically important among reliability. This paper describes the change in performance due to drive levels of the SAW resonator and their cause, mecahnism, and, further, corrective action against the performance degradation. an aluminum film grating reflector with IDT structure formed on an LiTaO3 substrate is used as the SAW resonator for measurement of the aging of electrical characteristics by means of parameters of the drive level. As a result, deterioration due to migration of grain boundary in the aluminum film is observed in a resonator exhibiting performance degradation. Moreover, from a comparison between the distribution of aluminum damaged and stress distribution due to SAW within the resonator, and theoretical estimation of its intensity, the internal stress in the aluminum film induced by the SAW energy causes migration and the stress is about 3.3 × 107 N/m2. to prevent performance degradation from its generation mechanism, we propose a method using copper‐doped aluminum film. From experiment we found that the drive level causing the performance degradation is improved more than 10 times.

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Power Dependence of Aging in SAW Resonators

Cited by 45 publications

References 11 publications

Residual noise reduction in AlN resonators by prolonged RF excitation

Residual noise reduction in AlN resonators by prolonged RF excitation

Novel Surface Transverse Wave Resonators with Low Loss and High Q

Metal‐migration of aluminum film on SAW resonator

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