Power dissipated in low-pressure radio-frequency discharge plasmas

Popov, O. E.; Godyak, Valery

doi:10.1063/1.335395

Cited by 141 publications

(82 citation statements)

References 3 publications

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“…The overall shape of the distribution functions consists of a peak at high ion energies corresponding to ions that arrive at the electrodes without undergoing any collisions within the sheath, and a broad distribution at lower energies caused by collisions within the sheath. 34,[50][51][52][53][54][55][56][57] Due to the geometrical asymmetry, the time averaged sheath voltage and width are larger at the smaller powered electrode compared to the larger grounded electrode. Therefore, the absolute energy scales of the distribution functions strongly differ from each other.…”

Section: B Control Of Ion Propertiesmentioning

confidence: 99%

The electrical asymmetry effect in geometrically asymmetric capacitive radio frequency plasmas

Schüngel

Eremin

Schulze

et al. 2012

Journal of Applied Physics

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The electrical asymmetry effect (EAE) allows an almost ideal separate control of the mean ion energy, hE i i, and flux, C i , at the electrodes in capacitive radio frequency discharges with identical electrode areas driven at two consecutive harmonics with adjustable phase shift, h. In such geometrically symmetric discharges, a DC self bias is generated as a function of h. Consequently, hE i i can be controlled separately from C i by adjusting the phase shift. Here, we systematically study the EAE in low pressure dual-frequency discharges with different electrode areas operated in argon at 13.56 MHz and 27.12 MHz by experiments, kinetic simulations, and analytical modeling. We find that the functional dependence of the DC self bias on h is similar, but its absolute value is strongly affected by the electrode area ratio. Consequently, the ion energy distributions change and hE i i can be controlled by adjusting h, but its control range is different at both electrodes and determined by the area ratio. Under distinct conditions, the geometric asymmetry can be compensated electrically. In contrast to geometrically symmetric discharges, we find the ratio of the maximum sheath voltages to remain constant as a function of h at low pressures and C i to depend on h at the smaller electrode. These observations are understood by the model. Finally, we study the self-excitation of non-linear plasma series resonance oscillations and its effect on the electron heating. V

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Section: B Control Of Ion Propertiesmentioning

confidence: 99%

The electrical asymmetry effect in geometrically asymmetric capacitive radio frequency plasmas

Schüngel

Eremin

Schulze

et al. 2012

Journal of Applied Physics

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“…The ions gain energy dominantly due to the acceleration toward the electrodes by the voltage drop across the sheaths. 1,26 There are different electron heating mechanisms in a CCRF discharge, 1,5,7,9,16,19,[27][28][29][30][31][32][33][34][35][36] e.g., Ohmic and stochastic heating. A detailed discussion of the different electron heating mechanisms is beyond the scope of this work.…”

Section: A Energy Balances For Electrons and Ionsmentioning

confidence: 99%

Power absorption in electrically asymmetric dual frequency capacitive radio frequency discharges

et al. 2011

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The symmetry of capacitive radio frequency discharges can be controlled via the electrical asymmetry effect by driving one electrode with a fundamental frequency and its second harmonic. In such electrically asymmetric discharges, the mean ion energies at both electrodes are controlled separately from the ion flux by tuning the phase angle between the harmonics at fixed voltage amplitudes. Here, the question why the ion flux is nearly independent of is answered by investigating the power absorbed by the electrons P e as a function of and time experimentally, by a particle in cell simulation, and an analytical model. The dynamics of P e is understood by the model and is found to be strongly affected by the choice of. However, on time average, P e is nearly constant, independently of. Thus, the ion flux remains approximately constant. In addition, it is shown that the absolute value of the individual voltages across the powered and grounded electrode sheath vary linearly with the dc self-bias. However, their sum remains constant. This yields, in combination with the constancy of the ion flux, a constant power absorbed by the ions and, in conclusion, a total power absorption that is independent of .

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“…The sheath surrounding the electrode then becomes an oscillatory structure of great intrinsic interest and practical significance. Especially remarkable physical effects occur when particle collisions within the sheath are rare, because substantial amounts of power may nevertheless be dissipated in the vicinity of the electrode, and discharges may be sustained predominantly by this so-called collisionless heating process [1,2]. Recently, new experimental contexts have appeared, with the rise of interest in dual-frequency capacitive discharges [3][4][5], and the related need to widen the range of frequencies that are used, including much larger frequencies that have been usual.…”

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confidence: 99%

Collisionless Heating in Capacitive Discharges Enhanced by Dual-Frequency Excitation

2006

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We discuss collisionless electron heating in capacitive discharges excited by a combination of two disparate frequencies. By developing an analytical model, we find, contrary to expectation, that the collisionless heating effect is much larger in the presence of two frequencies than when either frequency acts alone. This prediction is substantiated by kinetic simulations, which are also in excellent general quantitative agreement with the model for discharge parameters that are typical of recent experiments.

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Power dissipated in low-pressure radio-frequency discharge plasmas

Abstract: Articles you may be interested inFast modeling of the lowpressure capacitively coupled radiofrequency discharge based on the nonlocal approach Appl.Power dissipation measurements in a lowpressure N2 radiofrequency discharge

Cited by 141 publications

References 3 publications

The electrical asymmetry effect in geometrically asymmetric capacitive radio frequency plasmas

The electrical asymmetry effect in geometrically asymmetric capacitive radio frequency plasmas

Power absorption in electrically asymmetric dual frequency capacitive radio frequency discharges

Collisionless Heating in Capacitive Discharges Enhanced by Dual-Frequency Excitation

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