2012
DOI: 10.1117/1.jmm.11.2.023009
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Practical application of aerial image by principal component analysis to measure wavefront aberration of lithographic lens

Abstract: Abstract. In this paper, we propose a new method that can extract aberrations using aerial image measurements and present its experimental results on lithographic tools. Based on physical simulation and statistical analysis, a linear regression matrix is obtained establishing a connection between principal component coefficients of specific aerial images and Zernike coefficients. In the application phase, the aberrations of the projection lens are solved via the use of this regression matrix. An engineering mo… Show more

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Cited by 8 publications
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