1982
DOI: 10.1007/bf03338092
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Practical Applications of Ion Implantation

Abstract: The process of ion implantation, already widely adopted for the reliable manufacture of semiconductor devices, has now been developed as a highly sophisticated method of tailoring the surfaces of materials to resist wear and c?rrosion. Mechanisms exist that can bring about long-lastmg improvements in performance despite the s~allow penetration of the ions. Equipment has been deslgned to reduce the cost of the process, so as to be competitive with more conventional metal-finishing treatments.This article emphas… Show more

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Cited by 10 publications
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