Pre-production simulation of optical monitoring combining monochromatic and broadband monitoring strategies

Thoeny, Silvia Schwyn; Schachtler, Daniel; Waldner, Stephan; Frei, Thomas; Baertschi, Manuel

doi:10.1117/12.2597085

Advances in Optical Thin Films VII 2021

DOI: 10.1117/12.2597085

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Pre-production simulation of optical monitoring combining monochromatic and broadband monitoring strategies

Silvia Schwyn Thoeny¹,

Daniel Schachtler

Stephan Waldner³

et al.

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2023

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Pre-production estimates for the choice of strategy and algorithm for monochromatic monitoring of the production of optical coatings

Tikhonravov¹,

Lagutina²,

Lagutin³

et al. 2023

Appl. Opt.

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The paper proposes an approach for the pre-production selection of the most promising combination of a monochromatic monitoring strategy and a monitoring algorithm used for predicting termination of layer deposition. The approach is based on the previously introduced estimate of the strength of the expected error self-compensation effect and the new estimate, to the best of our knowledge, of the strength of the cumulative effect of thickness error growth presented in this paper. The application of the proposed approach is demonstrated using computational manufacturing experiments with various types of optical coating designs.

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Pre-production estimates for the choice of strategy and algorithm for monochromatic monitoring of the production of optical coatings

Tikhonravov¹,

Lagutina²,

Lagutin³

et al. 2023

Appl. Opt.

View full text Add to dashboard Cite

show abstract

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Pre-production simulation of optical monitoring combining monochromatic and broadband monitoring strategies

Cited by 1 publication

References 2 publications

Pre-production estimates for the choice of strategy and algorithm for monochromatic monitoring of the production of optical coatings

Pre-production estimates for the choice of strategy and algorithm for monochromatic monitoring of the production of optical coatings

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