Precise measurements of BAW and SAW properties of Langasite in the temperature range from 25&amp;#x00B0;C to 1000&amp;#x00B0;C

Bardong, Jochen; Schulz, Michał; Schmitt, Martin; Shrena, I.; Eisele, David; Mayer, Elena; Reindl, L.; Fritze, Holger

doi:10.1109/freq.2008.4623013

Cited by 28 publications

(9 citation statements)

References 15 publications

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“…This difference could be due to the use of two different wafers for these devices with possibly different misalignment. The measurement result of langasite(0, 138.5, 27) sensor is in fair agreement with previous work on langasite temperature sensors, where the surface acoustic wave velocity decrease at 700 ºC was about 50 m/sec for langasite (0, 138.5, 26.6) in Ref [5], and 45 m/sec for langasite with an unspecified Euler angle in Ref [12].…”

Section: Measurement Setupsupporting

confidence: 89%

“…The electromechanical coefficient of langasite is about 0.4%, comparable to quartz. It has no phase transition and decomposition below its melting temperature (1470 °C) [5]. In addition, langasite SAW sensors have been reported in several papers with wired gas and temperature sensing demonstrated up to 1000 ºC [7][8][9][10][11], and wireless temperature sensing up to 750 °C [12,13].…”

Section: Introductionmentioning

confidence: 99%

“…Among various piezoelectric materials for SAW devices, langasite (La 3 Ga 5 SiO 14 ) has been shown to be a promising substrate for high temperature sensing [5,6]. The electromechanical coefficient of langasite is about 0.4%, comparable to quartz.…”

Section: Introductionmentioning

confidence: 99%

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Pulse-mode temperature sensing with langasite SAW devices

Zheng

Chin

Greve

et al. 2010

2010 IEEE International Frequency Control Symposium

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Wired and wireless surface acoustic wave (SAW) sensors with langasite Euler angle (0, 138.5, 27) and (0, 138.5, 117) were fabricated for the purpose of temperature and gas sensing in high temperature combustion process. Their temperature responses were measured in pulse mode both wired to a high-temperature cable and in wireless mode attached to a dipole antenna. The observed surface acoustic wave velocity monotonically decreases above 200 °C with multiple reflections observable in wired measurements up to 900 ºC and in wireless mode up to 700 °C. Temperature resolution better than ± 0.5 C was achieved for wired and wireless measurements from 200 °C to 600 ºC.

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Section: Measurement Setupsupporting

confidence: 89%

Section: Introductionmentioning

confidence: 99%

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Pulse-mode temperature sensing with langasite SAW devices

Zheng

Chin

Greve

et al. 2010

2010 IEEE International Frequency Control Symposium

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“…Four types of delay lines were designed -short and long, with free and metallized propagation path to use in the measurements ( Figure 2). The group velocity νgr, and coupling coefficient k 2 can be calculated by analysis of the measured transfer functions of these delay lines [8], [9]. Each Chip has two delay lines, short and long.…”

Section: A Delay Linesmentioning

confidence: 99%

SAW-properties of langasite at high temperatures: Measurement and analysis

Shrena

Eisele

Mayer

et al. 2009

2009 3rd International Conference on Signals, Circuits and Systems (SCS)

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The measurement range of temperature using SAW-devices is depending on the substrate material used in the measurements. This dependence is related to the temperature point, where the substrate loses its piezoelectric properties. This occurs by the SAW-materials such as quartz and lithium niobate at about 570°C or 350°C, respectively. The piezoelectric material langasite (La3Ga5SiO14) has a thermodynamically stable phase and do not lose its piezoelectric properties up to its melting point at about 1470 °C and can be used for SAW devices at high temperatures. This paper presents the measurements of acoustical parameters of langasite up to 750°C. Langasite is used as substrate in the measurements with Euler angles (0°, 138.5°, 26.6°) and two different platinum (Pt) layer heights (45 nm and 75 nm) top of a zirconium (Zr) adhesion layer (4 nm). The investigated acoustic properties of langasite are group and phase velocity, propagation loss, and electromechanical coupling coefficient as functions of temperature. The measured data is analyzed using a special signal processing algorithm to obtain these acoustic properties of the Langasite.

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“…Now, the same phenomena of deterioration were observed with these films during annealing. Assertion (3) can also be removed because experiments conducted in the vacuum, nitrogen or argon have leaded to the same results [32,33,58,59]. Furthermore, platinum oxide PtO 2 cannot exist above 400°C [57].…”

Section: -894mentioning

confidence: 99%

Wireless and batteryless surface acoustic wave sensors for high temperature environments

Aubert

Elmazria

Assouar

2009

2009 9th International Conference on Electronic Measurement &Amp; Instruments

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Surface acoustic wave (SAW) devices are widely used as filter, resonator or delay line in electronic systems in a wide range of applications: mobile communication, TVs, radar, stable resonator for clock generation, etc. The resonance frequency and the delay line of SAW devices are depending on the properties of materials forming the device and could be very sensitive to the physical parameters of the environment.Since SAW devices are more and more used as sensor for a large variety of area: gas, pressure, force, temperature, strain, radiation, etc. The sensors based SAW present the advantage to be passive (batteryless) and/or wireless. These interesting properties combined with a small size, a low cost radio request system and a small antennas when operating at high frequency, offer new and exiting perspectives for wireless measurement processes and IDTAG applications. When the materials constituting the devices are properly selected, it becomes possible to use those sensors without embedded electronic in hostile environments (as high temperature, nuclear site, …) where no solutions are currently used. General principle of the SAW sensor in wired and wireless configurations will be developed and a review of recent works concerning the field of high temperature applications will be presented with specific attention given to the choice of materials constituting the SAW device.

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Precise measurements of BAW and SAW properties of Langasite in the temperature range from 25°C to 1000°C

Cited by 28 publications

References 15 publications

Pulse-mode temperature sensing with langasite SAW devices

Pulse-mode temperature sensing with langasite SAW devices

SAW-properties of langasite at high temperatures: Measurement and analysis

Wireless and batteryless surface acoustic wave sensors for high temperature environments

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