2006
DOI: 10.1017/s155192950005762x
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Precise SEM Cross Section Polishing via Argon Beam Milling

Abstract: SEM observation of a specimen cross section can provide important information for research and development as well as failure analysis. In most cases, surface observation alone cannot provide information concerning the cross sectional structure of granular materials, layered materials, fibrous materials, and powders. Preparing highly-polished cross sections of these materials is both a science and an art.Typically, a cross section is prepared using mechanical means like conventional mechanical polishing method… Show more

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Cited by 51 publications
(36 citation statements)
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“…This process results in a flat surface with only minor topographic variations. Because this method is not a mechanical polishing process, it does not have the disadvantages of incorporating abrasives into the final surface and does not alter materials that are sensitive to heat (Erdman et al, 2006).…”
Section: Specimen Preparationmentioning
confidence: 99%
“…This process results in a flat surface with only minor topographic variations. Because this method is not a mechanical polishing process, it does not have the disadvantages of incorporating abrasives into the final surface and does not alter materials that are sensitive to heat (Erdman et al, 2006).…”
Section: Specimen Preparationmentioning
confidence: 99%
“…Ion beam milling provides an opportunity to produce surfaces that are nearly free of artifacts and distortions produced by conventional cutting and grinding processes [11]. Therefore, ion beam milling may be a method to minimize residual surface stresses without annealing.…”
mentioning
confidence: 99%
“…However, this technique induces potentially more damage to the surface since it uses mainly Gallium source ( [7]) and typical areas produced by FIB (about µm 2 ) are much smaller than those prepared by BIB (about mm 2 ). Thus, the combination of Ar-BIB and SEM facilities provides an efficient method to get a direct access to porosity and allowing its detailed understanding.…”
Section: Discussionmentioning
confidence: 99%
“…Firstly, air-dried core samples were sub-sampled by slow cutting with a miniature diamond saw using air as cooling medium.. A flat surface of these samples of about 1cm 3 was cross-sectioned perpendicular to the diamond-cut surface, using a stand-alone argon beam machine (cross-section polisher JEOL SM-09010, [7]) to produce high quality polished cross-sections of about 2 mm 2 . We used 6 kV voltage achieving currents of about 150-200 nA.…”
Section: Samples and Methodsmentioning
confidence: 99%