Based on a highly sensitive differential spectroscopy technique, we present a non-contact method of opticalscanning thermal imaging with a possibility of sub-thermal-wavelength spatial resolution. This technique is general and can also be applied to imaging of strain or impurity distributions at the surfaces of semiconductors. This procedure is particularly well suited for near-field imaging and investigation of thermal transport on the nanoscale. Applications to optical refrigeration in semiconductors are discussed.Keywords: derivative spectroscopy, two-band differential spectral metrology, balanced photodetection, thermal imaging, high sensitivity thermometry, non-contact thermometry, laser cooling of solids
BACKGROUNDOptical temperature measurement techniques offer several key advantages over traditional thermocouple based measurement. For one, non-contact nature of optical probe does not perturb the thermodynamic state of the system. Bulk analyte temperature can be measured by spectrally-integrated blackbody radiation using various compositions of mercury cadmium telluride detectors (MCT, Hg x Cd 1−x Te), tuned to specific spectral band of the emission. For example, for x=0.2, MCT detector becomes sensitive in the 8-12 µm, corresponding peak blackbody emission at ambient temperature. MCT detection has been perfected and imaging systems with typical temperature resolution of 0.1 K are commertially available.Several drawbacks of the blackbody radiation detection preclude scientific applications of this scheme. Typical problems of low temperature resolution (0.1 K) and scene temperature requirement of 300 K (no signals below 250 -270 K for 8-12 µm arrays) become particularly detrimental for analytes with low thermal emissivity values, e.g. semiconductor devices.To overcome the challenges of blackbody radiation detection, numerous pump-probe local temperature photothermal measurement techniques have been proposed and realized. Here, temperature-induced effects are probed near the electronic resonances of the analyte, i.e. in the UV-NIR region of electromagnetic spectrum. The most common of these techniques is termed photothermal deflection (PTD) 1 and relies on detection of probe deflection through a thermal lens, i.e. a thermal profile resulting from non-radiative relaxation of the pump-induced excitation. PTD microscopy has also been proposed 2 and demonstrated. 3Since PTD measures the change of the refractive index (n(r)), we need to consider all of the contributions to the refractive index due to the action of the pump, i.e. both population (δN ) and temperature (δT ) deviations. The total change is thus:In above and for a (general case) collinear pump-probe geometry, δN (r) variation is linearly proportional to a radial intensity distribution of the pump I(r), while δT (r) is a time-dependent quantity obtained from a solution of a heat equation with appropriate boundary conditions. For most physical cases, there exist an