Precision charge drive with low frequency voltage feedback for linearization of piezoelectric hysteresis

Fleming, Andrew J.

doi:10.1109/acc.2013.6580781

Cited by 3 publications

(2 citation statements)

References 22 publications

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“…A drawback of piezoelectric elements is their nonlinearity due to hysteresis, creep, and they often require hundreds of volts to achieve several micrometers of stroke [17]. To circumvent hysteresis, piezo-actuators are charge-driven [18]. To reduce the high voltages required for actuation, stacked piezo-actuators are used [19].…”

Section: Introductionmentioning

confidence: 99%

Influence Function Measurement Technique Using the Direct and Indirect Piezoelectric Effect for Surface Shape Control in Adaptive Systems

Muganda

Jansen

Homburg

et al. 2022

IEEE Trans. Automat. Sci. Eng.

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Since the introduction of adaptive systems for corrective measures, static and dynamic disturbances have been reduced through the manipulation of surface shape in a well-controlled manner. One important application where adaptive systems are highly needed is in the future photo-lithography machines, particularly the wafer table where disturbances affect overlay and focus performance. To reduce overlay and focus errors, a dense array of actuators must be integrated into the wafer table to apply both in-and out-of-plane corrective deformations to the wafer surface. To realize a certain wafer shape, influence functions are linearly superimposed. Accurate models of the influence functions result in an accurate prediction of the final wafer shape. To reduce calibration errors, the influence function of every actuator needs to be determined. Here, we propose a technique to rapidly measure the influence function: the influence function measurement (IFM) technique. Using the actuate-sense property of piezoelectric materials, the influence function is determined by activating one piezo-actuator and measuring the charge induced on the neighboring piezo-actuators. The measured charges are compared to the results of finite element simulations and the absolute difference of 0.3 % is reported for the inter-actuator charge coupling parameters. This clearly indicates the potential of the proposed technique. Note to Practitioners-A critical step during the integrated-circuit lithographic fabrication process is the exposure.A particular practical challenge in this step is to correct for the mismatch between the optical image plane and the wafer surface, caused by wafer deformations. The mismatch negatively impacts the overlay and focus performance. To reduce the mismatch, actuators can be embedded into the wafer table to counteract wafer deformations, where the overall wafer surface shape is a superposition of each actuator's influence function. As part of the calibration for the embedded actuators, their influence functions are measured and stored. However, errors arise when influence functions are not measured for every actuator. Additionally, for different wafers, the influence functions vary hence the calibration should be done per wafer.

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Section: Introductionmentioning

confidence: 99%

Influence Function Measurement Technique Using the Direct and Indirect Piezoelectric Effect for Surface Shape Control in Adaptive Systems

Muganda

Jansen

Homburg

et al. 2022

IEEE Trans. Automat. Sci. Eng.

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“…Jahrgang a function of the applied voltage and the resulting current into the speaker. This effect is dependent on the type of driving architecture used, as described in [5,6] and is considered inside for the driving concept as well.…”

Section: Hysteresismentioning

confidence: 99%

Design of a MEMS speaker driver

Hänsler

Strle

Auer

2018

Elektrotech. Inftech.

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Microelectromechanical systems (MEMS) have already found widespread use in highly integrated audio applications. Currently, they are used for microphones where their small size has enabled the use of multiple microphones in a single device to improve noise cancellation. Nowaday, even loudspeakers realized as MEMS structures are possible, which brings up new challenges in circuit design that are the focus of this paper.Starting with an overview of current research activities of MEMS speakers, their advantages and disadvantages, as well as the peculiarities of the driver design are discussed. Compared to electrodynamic speakers, MEMS speakers have a different physical structure which needs to be accounted for when designing the driving circuitry. Possible driver concepts are presented and compared with special consideration of their efficiency and audio quality. Existing concepts are shown and new concepts are proposed.Keywords: MEMS; MEMS speaker; MEMS driver; audio amplifier; high efficient; energy recovery Design eines Treibers für MEMS-Lautsprecher. Mikroelektromechanische Systeme (MEMS) haben bereits eine weite Verbreitung in hoch integrierten

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Modeling and identification of hysteresis with modified Preisach model in piezoelectric actuator

Song

Duggen

Lassen

et al. 2017

2017 IEEE International Conference on Advanced Intelligent Mechatronics (AIM)

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Precision charge drive with low frequency voltage feedback for linearization of piezoelectric hysteresis

Cited by 3 publications

References 22 publications

Influence Function Measurement Technique Using the Direct and Indirect Piezoelectric Effect for Surface Shape Control in Adaptive Systems

Influence Function Measurement Technique Using the Direct and Indirect Piezoelectric Effect for Surface Shape Control in Adaptive Systems

Design of a MEMS speaker driver

Modeling and identification of hysteresis with modified Preisach model in piezoelectric actuator

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