2017
DOI: 10.1504/ijnm.2017.083854
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Precision cutting of single crystal silicon using CBN tool with large top corner radius

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“…It can be seen that the exponent of cutting force ratio nf is approximately proportional to the cutting speed, and the inclination as obtained by a least-squares method is 7.938×10 -4 . 4) yields the same results as the face cutting of single crystal silicon that we have performed, and it is considered that the main cause of tool wear is due to silicon particles [18].…”
Section: Experimental Apparatus and Methodsmentioning
confidence: 54%
“…It can be seen that the exponent of cutting force ratio nf is approximately proportional to the cutting speed, and the inclination as obtained by a least-squares method is 7.938×10 -4 . 4) yields the same results as the face cutting of single crystal silicon that we have performed, and it is considered that the main cause of tool wear is due to silicon particles [18].…”
Section: Experimental Apparatus and Methodsmentioning
confidence: 54%