Precision glass machining, drilling and profile cutting by short pulse lasers

Nikumb, Suwas; Chen, Q.; Li, C.; Reshef, H.; Zheng, Hong; Qiu, Hai; Low, D. K. Y.

doi:10.1016/j.tsf.2004.08.136

Cited by 155 publications

(78 citation statements)

References 21 publications

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“…Nikumb et al 8) drilled a cavity with a diameter of 15 mm in glass by using short pulse laser. Lu 9) demonstrated a microhole in titanium plate by using micro-ECM.…”

Section: Introductionmentioning

confidence: 99%

Drilling Microholes in Hot Tool Steel by Using Micro-Electro Discharge Machining

Tai

Masusawa²,

Lee

2007

Mater. Trans.

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This study presents an investigation into the drilling of a deep microholes with the depth of 320 mm in tool steel SKD61 by the Micro-EDM process. The electrode with the diameter of 26 mm is machined by the method of wire electrodischarge grinding (WEDG). Optical microscopy, scanning electron microscopy, and confocal laser scanning microscopy techniques are used to determine the influence of the process parameters upon hole enlargement, electrode wear rate, material removal rate, wear ratio, and the observed surface topography. The results of the study reveal the optimum parameter settings for the Micro-EDM machining of a high aspect ratio microhole are as follows: (1) a pulse voltage between 60 and 100 V, (2) a capacitance between 80 pF and 220 pF. Finally when the depth exceeds 200 mm, the shape of the micro hole almost becomes tapered due to the corner wear of the electrode and the secondary discharge along the side of the hole.

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“…Nikumb et al 8) drilled a cavity with a diameter of 15 mm in glass by using short pulse laser. Lu 9) demonstrated a microhole in titanium plate by using micro-ECM.…”

Section: Introductionmentioning

confidence: 99%

Drilling Microholes in Hot Tool Steel by Using Micro-Electro Discharge Machining

Tai

Masusawa²,

Lee

2007

Mater. Trans.

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“…펨토초 레 이저 가공은 매우 짧은 펄스폭으로 인해 다광자 흡수 현상으 로 다양한 소재의 물질이 가공 가능하며 나노초, 피코초 레 이저보다 작은 열영향으로 인해 미세 회절격자 가공, 광섬유 팁 가공, 마이크로 드릴링 등의 정밀가공에 많이 사용된다 [10][11][12] . 그래서 이를 사용하면 보다 물질을 더 깊고 빠르고 효 율적으로 가공이 가능하며, 최근에는 펨토초 레이저를 이용 하여 트렌치 구조를 가공하여 PLC 스플리터 칩에 적용하여 광섬유를 정밀하게 정렬하여 광손실을 줄이는 연구도 진행 되었다 [13] . …”

Section: 서 론 파장분할다중 (Wavelength Division Multiplexing Wdm) 광통신 시스unclassified

Femtosecond-Laser Micromachining of a Thermal Blocking Trench for an Enhanced PLC Variable Optical Attenuator

Yoo¹,

Choi²,

Sohn³

et al. 2016

Korean Journal of Optics and Photonics

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In this paper, a trench structure was fabricated by femtosecond-laser machining to eliminate thermal crosstalk in a multichannel variable optical attenuator (VOA), to prevent decreasing attenuation efficiency of the VOA. Trenches of a variety of widths and depths were fabricated on the VOA chips by femtosecond-laser processing. After the machining, attenuation according to current change was observed in each VOA chip module with trenches. As a result, we could observe high responsivity of attenuation and low power consumption, and that the heat of each channel barely influenced other channels.

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“…[9][10][11]14,16,23 It takes place following 9 Microscope view of micro-hole drilling in bovine tendon using fs fiber laser.…”

Section: Optical Engineeringmentioning

confidence: 99%

“…Many researchers have paid much attention to the microhole drilling and micro-cutting using fs lasers, including both transparent materials [1][2][3][4][5][6][7][8][9] and nontransparent materials. [10][11][12][13][14][15] Especially for transparent materials, different methods have been used to generate high-aspect-ratio micro-holes such as combination with chemical etching, 4,5 beam shaping, 2,6 and liquid-assisted drilling from rear surface.…”

Section: Introductionmentioning

confidence: 99%

Micro-hole drilling and cutting using femtosecond fiber laser

2014

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Abstract. Micro-hole drilling and cutting in ambient air are presented by using a femtosecond fiber laser. At first, the micro-hole drilling was investigated in both transparent (glasses) and nontransparent (metals and tissues) materials. The shape and morphology of the holes were characterized and evaluated with optical and scanning electron microscopy. Debris-free micro-holes with good roundness and no thermal damage were demonstrated with the aspect ratio of 8∶1. Micro-hole drilling in hard and soft tissues with no crack or collateral thermal damage is also demonstrated. Then, trench micromachining and cutting were studied for different materials and the effect of the laser parameters on the trench properties was investigated. Straight and clean trench edges were obtained with no thermal damage.

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Precision glass machining, drilling and profile cutting by short pulse lasers

Cited by 155 publications

References 21 publications

Drilling Microholes in Hot Tool Steel by Using Micro-Electro Discharge Machining

Drilling Microholes in Hot Tool Steel by Using Micro-Electro Discharge Machining

Femtosecond-Laser Micromachining of a Thermal Blocking Trench for an Enhanced PLC Variable Optical Attenuator

Micro-hole drilling and cutting using femtosecond fiber laser

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