Precision imaging multilayer optics for soft X-rays and extreme ultraviolet bands

Барышева, М. М.; Pestov, A. E.; Салащенко, Н. Н.; Toropov, M. N.; Чхало, Н. И.

doi:10.3367/ufne.0182.201207c.0727

Cited by 52 publications

(12 citation statements)

References 113 publications

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“…For the number of electron in a bunch about 10 10 needful statistics may be obtained during some hours. Using of Mo/Be or Mo/Si X-ray mirrors with wave length about 15 nm may increase the value and the reflection coefficient up to 40 μm and 60% respectively [27]. Unfortunately these X-ray mirrors have the energy resolution about some percent; therefore we will obtain an increasing of the angular size of the reflection spot about ten times.…”

Section: Calculation Results and Discussionmentioning

confidence: 99%

“…The most optimal way is using a Cr/Sc multilayer radiator with the lattice parameter = 2.34 nm turned on the angle Θ = 45 • as in the experiment [25]. Similar mirrors with 250 layers provide a reflection coefficient about 10%, [27] and angular size of the reflection spot Δ = Δ ∕ ⋅ (Θ ) ≈ 4 mrad. As for zero impact parameter transition radiation intensity and diffraction radiation one have approximately the same order of magnitude [17] we may estimate transition radiation yield.…”

Section: Calculation Results and Discussionmentioning

confidence: 99%

See 1 more Smart Citation

Diffracted diffraction radiation and its application to beam diagnostics

Goponov

Shatokhin

Sumitani

et al. 2018

Nuclear Instruments and Methods in Physics Research Section A:

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We present theoretical considerations for diffracted diffraction radiation and also propose an application of this process to diagnosing ultra-relativistic electron (positron) beams for the first time. Diffraction radiation is produced when relativistic particles move near a target. If the target is a crystal or X-ray mirror, diffraction radiation in the X-ray region is expected to be diffracted at the Bragg angle and therefore be detectable. We present a scheme for applying this process to measurements of the beam angular spread, and consider how to conduct a proof-of-principle experiment for the proposed method.

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Section: Calculation Results and Discussionmentioning

confidence: 99%

Section: Calculation Results and Discussionmentioning

confidence: 99%

Diffracted diffraction radiation and its application to beam diagnostics

Goponov

Shatokhin

Sumitani

et al. 2018

Nuclear Instruments and Methods in Physics Research Section A:

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“…Chemical and diffusion interactions between adjacent layers can reduce the reflectance of mirrors. Development of highly reflective mirrors is founded on thorough selection of contacting materials with the purpose of suppressing these interactions [6]. However, some promising structures like Mo/Si (for λ = 13.5 nm) and La/B 4 C (for λ = 6.7 nm) exhibit strong interlayer interactions resulting in broadening of interfaces and asymmetrical form of layer profiles and in decreasing of the density of the layer of a heavier element.…”

Section: Introductionmentioning

confidence: 99%

“…It allows preventing the degradation of mirror reflectance caused by the formation of both amorphous and crystalline phases of molybdenum silicide, diffusion of silicon and crystallization of molybdenum layers [2,6]. For that, 0.3 nm-thick B 4 C barriers have been used along with decreasing of the width of Mo layers, and magnetron sputtering has been optimized by increasing the temperature of substrate and bias of its potential.…”

Section: Introductionmentioning

confidence: 99%

The role of ultra-thin carbon barrier layers for fabrication of La/B4C interferential mirrors: Study by time-of-flight secondary ion mass spectrometry and high-resolution transmission electron microscopy

et al. 2015

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“…A detailed discussion on the multilayer physics and deposition techniques can be found in the review papers. [5][6][7][8][9] Here, we mainly focus on methods to tune and manipulate the spectral properties of multilayer optics.…”

Section: Introductionmentioning

confidence: 99%

Spectral tailoring of nanoscale EUV and soft x-ray multilayer optics

Huang

Медведев

Kruijs

et al. 2017

Applied Physics Reviews

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Extreme ultraviolet and soft X-ray (XUV) multilayer optics have experienced significant development over the past few years, particularly on controlling the spectral characteristics of light for advanced applications like EUV photolithography, space observation, and accelerator- or lab-based XUV experiments. Both planar and three dimensional multilayer structures have been developed to tailor the spectral response in a wide wavelength range. For the planar multilayer optics, different layered schemes are explored. Stacks of periodic multilayers and capping layers are demonstrated to achieve multi-channel reflection or suppression of the reflective properties. Aperiodic multilayer structures enable broadband reflection both in angles and wavelengths, with the possibility of polarization control. The broad wavelength band multilayer is also used to shape attosecond pulses for the study of ultrafast phenomena. Narrowband multilayer monochromators are delivered to bridge the resolution gap between crystals and regular multilayers. High spectral purity multilayers with innovated anti-reflection structures are shown to select spectrally clean XUV radiation from broadband X-ray sources, especially the plasma sources for EUV lithography. Significant progress is also made in the three dimensional multilayer optics, i.e., combining micro- and nanostructures with multilayers, in order to provide new freedom to tune the spectral response. Several kinds of multilayer gratings, including multilayer coated gratings, sliced multilayer gratings, and lamellar multilayer gratings are being pursued for high resolution and high efficiency XUV spectrometers/monochromators, with their advantages and disadvantages, respectively. Multilayer diffraction optics are also developed for spectral purity enhancement. New structures like gratings, zone plates, and pyramids that obtain full suppression of the unwanted radiation and high XUV reflectance are reviewed. Based on the present achievement of the spectral tailoring multilayer optics, the remaining challenges and opportunities for future researches are discussed.

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Precision imaging multilayer optics for soft X-rays and extreme ultraviolet bands

Cited by 52 publications

References 113 publications

Diffracted diffraction radiation and its application to beam diagnostics

Diffracted diffraction radiation and its application to beam diagnostics

The role of ultra-thin carbon barrier layers for fabrication of La/B4C interferential mirrors: Study by time-of-flight secondary ion mass spectrometry and high-resolution transmission electron microscopy

Spectral tailoring of nanoscale EUV and soft x-ray multilayer optics

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