Precision Machining of Electroless Nickel Mandrel and Fabrication of Replicated Mirrors for a Soft X-Ray Microscope

Chon, Kwon Su; Namba, Yoshiharu; Yoon, Kwon‐Ha

doi:10.1299/jsmec.49.56

Cited by 18 publications

(8 citation statements)

References 8 publications

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“…The turning marks were cleared away completely and the Ra value decreased to 3nm. The surface can be improved further by optimizing the experimental parameters and/or controlling the material removal amount if required (Chon et al, 2006).…”

Section: Resultsmentioning

confidence: 99%

Abrasive Jet Polishing and its Applications in Surface Finishing

Li¹

2010

American Journal of Nanotechnology

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Problem statement: Single Point Diamond Turning (SPDT) is highly deterministic and versatile in producing various forms of precise optics. A typical example is the production of large offaxis aspheric mirrors and various infrared mirrors and mandrels. However, the fine periodical turning marks left in the surface critically limit its performance and they are difficult to be avoided for traditional polishing methods. Approach: This study introduced abrasive jet polishing to remove the periodical turning marks. Firstly the principle of abrasive jet polishing technique was described. Then combined with theoretical study, Computational Fluid Dynamics (CFD) simulation and process experiments, the mechanism of the material removal in abrasive jet polishing was analyzed. It was concluded that the wall shear stress of micro-abrasives is the main cause of material removal in this process. Based on this, abrasive jet polishing experiment was carried out on plane copper sample and the surface of Arrayed Waveguide Grating (AWG) which were machined after SPDT. Results: After polishing the periodical ripples on copper sample left by SPDT were removed completely and the Ra value of the sample decreases from 11nm to 3nm. In addition, the burrs and pits on the surface of AWG Mould after SPDT are removed successfully with this technique, which solves an intractable problem in manufacture area. Conclusion: In this experiment it was found that abrasive jet polishing technique has its inimitable advantages in removing the periodical turning marks and finishing the AWG mould and it will have a broad prospect of applications in modern precision manufacture area.

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Section: Resultsmentioning

confidence: 99%

Abrasive Jet Polishing and its Applications in Surface Finishing

Li¹

2010

American Journal of Nanotechnology

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“…The X-ray astronomical satellite consists of over 1,200 super mirror pieces in a telescope with a diameter of 600 mm [1][2][3]. These mirrors are prepared using the "replica method" that presses and transcribes the mirror material on the surface into thin aluminum plates [4][5][6][7]. These techniques using precision molding dies [8][9][10][11] have also recently been applied not only for X-ray telescopes but also for various other optical components that require rapid and low-cost manufacturing.…”

Section: Introductionmentioning

confidence: 99%

Precision Polishing Techniques for Metal Molding Dies and Glass Forming Technology “Slumping Method”

Shinozaki¹,

Kinoshita²

2021

Product Life Cycle - Opportunities for Digital and Sustainable Transformation

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Precision manufacturing techniques are required for the fabrication of small and large optical components in various fields. To prepare molding dies with highly precise geometric shapes and surface roughness that are used in certain molding processes, polishing techniques have been investigated for many materials. In this research, the polishing techniques used for a SUS310S stainless steel molding die for the glass forming technology “slumping method” were investigated. The surface roughness of the polished SUS310S molding die surface was below Rz = 120 nm (P–V), Ra = 20 nm after 35 h of polishing with 0.5% alumina polishing liquid under a pressure of 1.7 kPa. In addition, the centerless polishing machine was designed and manufactured to polish cylindrical molding die surfaces with same polishing conditions. As the result of using cylindrical molding dies that made by this centerless polishing machine, the surface roughness of the glass plate formed using the slumping method with the polished molding die was below Ra = 20 nm. These results indicate that the surface roughness of the molding die had a small effect on the glass plate surface formed using the slumping method.

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“…The main limitation has been the resulting microstructure, which is called SPDT marks and which produces a diffraction effect and stray light. For this reason, many components, including x-ray mandrels in particular, are hand postpolished to achieve both the form and texture required [2]. But hand postpolishing is extremely difficult on aspheres and free forms, which leads to an inevitable trade-off between quality of the surface texture achieved and destruction of the surface figure. Consequently, a method to eliminate the diamond-turning marks without destroying the form could be a required process going forward.…”

Section: Introductionmentioning

confidence: 99%

Removal of single point diamond-turning marks by abrasive jet polishing

Wang

Peng

et al. 2011

Appl. Opt.

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Single point diamond turning (SPDT) is highly controllable and versatile in producing axially symmetric forms, non-axially-symmetric forms, microstructured surfaces, and free forms. However, the fine SPDT marks left in the surface limit its performance, and they are difficult to reduce or eliminate. It is unpractical for traditional methods to remove the fine marks without destroying their forms, especially for the aspheres and free forms. This paper introduces abrasive jet polishing (AJP) for the posttreatment of diamond-turned surfaces to remove the periodic microstructures. Samples of diamond-turned electroless nickel plated plano mirror were used in the experiments. One sample with an original surface roughness of more than 400 nm decreased to 4 nm after two iterations abrasive jet polishing; the surface roughness of another sample went from 3.7 nm to 1.4 nm after polishing. The periodic signatures on both of the samples were removed entirely after polishing. Contrastive experimental research was carried out on electroless nickel mirror with magnetorheological finishing, computer controlled optical surfacing, and AJP. The experimental results indicate that AJP is more appropriate in removing the periodic SPDT marks. Also, a figure maintaining experiment was carried out with the AJP process; the uniform polishing process shows that the AJP process can remove the periodic turning marks without destroying the original form.

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Precision Machining of Electroless Nickel Mandrel and Fabrication of Replicated Mirrors for a Soft X-Ray Microscope

Cited by 18 publications

References 8 publications

Abrasive Jet Polishing and its Applications in Surface Finishing

Abrasive Jet Polishing and its Applications in Surface Finishing

Precision Polishing Techniques for Metal Molding Dies and Glass Forming Technology “Slumping Method”

Removal of single point diamond-turning marks by abrasive jet polishing

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