Precision of evaluation methods in white light interferometry. Correlogram correlation method

Kiselev, I.; Kiselev, Egor I.; Drexel, Michael V.; Hauptmannl, Michael

doi:10.1016/j.measurement.2018.03.060

Cited by 16 publications

(9 citation statements)

References 15 publications

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“…20 Various methods have been developed for reconstructing surface topography from fringes, such as the frequency domain analysis (FDA), 10 envelope detection, 23 and the correlogram correlation method. 24 In practice, it is not always possible to perform the second step of evaluating fringe phase, resulting in a loss of precision as the price for greater tolerance of surface texture. 25 When measuring rough surfaces at scales less than the lateral optical resolution of the microscope objective, the phase of the fringe data may not correlate well with the surface profile and random phase jumps may be observed in the fringe data.…”

Section: Topography Reconstruction Methodsmentioning

confidence: 99%

Optimization of surface measurement for metal additive manufacturing using coherence scanning interferometry

Gómez

Thompson

et al. 2017

Opt. Eng

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Abstract. Surface topography measurement for metal additive manufacturing (AM) is a challenging task for contact and noncontact methods. We present an experimental investigation of the use of coherence scanning interferometry (CSI) for measuring AM surfaces. Our approach takes advantage of recent technical enhancements in CSI, including high dynamic range for light level and adjustable data acquisition rates for noise reduction. The investigation covers several typical metal AM surfaces made from different materials and AM processes. Recommendations for measurement optimization balance three aspects: data coverage, measurement area, and measurement time. This study also presents insight into areas of interest for future rigorous examination, such as measuring noise and further development of guidelines for measuring metal AM surfaces.

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Section: Topography Reconstruction Methodsmentioning

confidence: 99%

Optimization of surface measurement for metal additive manufacturing using coherence scanning interferometry

Gómez

Thompson

et al. 2017

Opt. Eng

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“…Moreover, the noise type was detected by analyzing autocorrelation coefficients for different noise [ 35 ]. The effect of some noise errors was defined and reduced [ 36 ] with various methods—for example, correlogram correlation [ 37 , 38 ], Fourier reduction, or random phase exclusion methods [ 39 ], by detecting limits of the roughness tester [ 40 ], limitation and matching of bandwidth for stylus or optical instruments, or the low-noise interference microscope approach [ 41 ], reproducing measurement images with Instrument Transfer Functions (ITFs) or Optical Transfer Functions (OTFs) [ 42 ], some optimization methods [ 43 ] for Coherence Scanning Interferometry measurements, z-axis repeatability studies [ 44 ], an orthogonal wavelet de-noising algorithm [ 45 ], thresholding function [ 46 ], or a comprehensively improved algorithm, which combines wavelet packet decomposition and improved complete ensemble empirical modal decomposition of adaptive noise [ 47 ].…”

Section: Introductionmentioning

confidence: 99%

Reduction of Influence of the High-Frequency Noise on the Results of Surface Topography Measurements

Podulka

2021

Materials

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The influence of errors in the processes of detection and then reduction of surface topography measurement noise is of great importance; many research papers are concerned with the definition of this type of measurement error. This paper presents the influence of high-frequency measurement noise, defined for various types of surface textures, e.g., two-process plateau-honed, turned, ground, or isotropic. Procedures for the processing of raw measured data as a detection of the high-frequency errors from the results of surface topography measurements were proposed and verified (compared) according to the commonly used (available in the commercial software of the measuring equipment) algorithms. It was assumed that commonly used noise-separation algorithms did not always provide consistent results for two process textures with the valley-extraction analysis; as a result, some free-of-dimple (part of the analyzed detail where dimples do not exist) areas were not carefully considered. Moreover, the influence of measured data processing errors on surface topography parameter calculation was not comprehensively studied with high-frequency measurement noise assessments. It was assumed that the application of the Wavelet Noise Extraction Procedure (WNEP) might be exceedingly valuable when the reduction of a disparate range of measured frequencies (measurement noise) was carefully considered.

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“…The combined WLPSI algorithms can effectively improve the measurement accuracy and offer a large dynamic range without a 2π ambiguity problem, but the trade-off is computational load and processing time. Kiselev et al [ 34 ] proposed a correlogram correlation method that used the covariance of a correlogram measured with the reference correlogram at the best fitting position as the criterion for the appropriateness analysis, providing fewer outliers than the envelope parabola method when measuring a rough groove wall of about 40° pitch.…”

Section: Introductionmentioning

confidence: 99%

Performance Analysis of Surface Reconstruction Algorithms in Vertical Scanning Interferometry Based on Coherence Envelope Detection

Liang

Kang

2021

Micromachines

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Optical interferometry plays an important role in the topographical surface measurement and characterization in precision/ultra-precision manufacturing. An appropriate surface reconstruction algorithm is essential in obtaining accurate topography information from the digitized interferograms. However, the performance of a surface reconstruction algorithm in interferometric measurements is influenced by environmental disturbances and system noise. This paper presents a comparative analysis of three algorithms commonly used for coherence envelope detection in vertical scanning interferometry, including the centroid method, fast Fourier transform (FFT), and Hilbert transform (HT). Numerical analysis and experimental studies were carried out to evaluate the performance of different envelope detection algorithms in terms of measurement accuracy, speed, and noise resistance. Step height standards were measured using a developed interferometer and the step profiles were reconstructed by different algorithms. The results show that the centroid method has a higher measurement speed than the FFT and HT methods, but it can only provide acceptable measurement accuracy at a low noise level. The FFT and HT methods outperform the centroid method in terms of noise immunity and measurement accuracy. Even if the FFT and HT methods provide similar measurement accuracy, the HT method has a superior measurement speed compared to the FFT method.

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Precision of evaluation methods in white light interferometry. Correlogram correlation method

Cited by 16 publications

References 15 publications

Optimization of surface measurement for metal additive manufacturing using coherence scanning interferometry

Optimization of surface measurement for metal additive manufacturing using coherence scanning interferometry

Reduction of Influence of the High-Frequency Noise on the Results of Surface Topography Measurements

Performance Analysis of Surface Reconstruction Algorithms in Vertical Scanning Interferometry Based on Coherence Envelope Detection

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