Precision tool setting for fabrication of a microstructure array

Gao, Wei; Chen, Yuan-Liu; Lee, Kang‐Won; Noh, Young-Jin; Shimizu, Yuki; Ito, So

doi:10.1016/j.cirp.2013.03.013

Cited by 49 publications

(13 citation statements)

References 9 publications

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“…By using the FS-FTS, the diamond cutting tool, which has been conventionally only used for fabrication of microstructures, is employed as a forcecontrolled measuring stylus to measure the cross-sectional profile of the fabricated microstructures with a constant measuring force of 0.15 mN by the same diamond tool, without using an additional surface measuring instrument (Fig. 22) [62]. Such measurement technology was also used for on-machine measurement of cutting edge contours of single point diamond tools [28] [25] and initial surface form of brittle workpieces [26] as well as for in-process measurement and repair of defective microstructures [29].…”

Section: Contact-type Probesmentioning

confidence: 99%

On-machine and in-process surface metrology for precision manufacturing

et al. 2019

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On-machine and in-process surface metrology are important for quality control in manufacturing of precision surfaces. The classifications, requirements and tasks of on-machine and in-process surface metrology are addressed. The state-of-the-art on-machine and in-process measurement systems and sensor technologies are presented. Error separation algorithms for removing machine tool errors, which is specially required in on-machine and in-process surface metrology, are overviewed, followed by a discussion on calibration and traceability. Advanced techniques on sampling strategies, measurement systems-machine tools interface, data flow and analysis as well as feedbacks for compensation manufacturing are then demonstrated. Future challenges and developing trends are also discussed.

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Section: Contact-type Probesmentioning

confidence: 99%

On-machine and in-process surface metrology for precision manufacturing

et al. 2019

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“…A variety of on-machine measurement systems (e.g., linear variable differential transformer (LVDT) [8], optical slope sensor [223], AFM head [224], force sensorintegrated fast tool servo [225], and chromatic confocal probe [226]) have been developed for form error compensation of complex surfaces, avoiding a repositioning error and extending the measuring range though the machine axis motions. Optical interferometry is a great choice for non-contact on-machine surface measurement [26,227], providing high resolution, high accuracy, and low uncertainty.…”

Section: On-machine Measurementmentioning

confidence: 99%

Development of surface reconstruction algorithms for optical interferometric measurement

2020

Front. Mech. Eng.

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Optical interferometry is a powerful tool for measuring and characterizing areal surface topography in precision manufacturing. A variety of instruments based on optical interferometry have been developed to meet the measurement needs in various applications, but the existing techniques are simply not enough to meet the ever-increasing requirements in terms of accuracy, speed, robustness, and dynamic range, especially in on-line or on-machine conditions. This paper provides an in-depth perspective of surface topography reconstruction for optical interferometric measurements. Principles, configurations, and applications of typical optical interferometers with different capabilities and limitations are presented. Theoretical background and recent advances of fringe analysis algorithms, including coherence peak sensing and phase-shifting algorithm, are summarized. The new developments in measurement accuracy and repeatability, noise resistance, self-calibration ability, and computational efficiency are discussed. This paper also presents the new challenges that optical interferometry techniques are facing in surface topography measurement. To address these challenges, advanced techniques in image stitching, on-machine measurement, intelligent sampling, parallel computing, and deep learning are explored to improve the functional performance of optical interferometry in future manufacturing metrology.

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“…The form accuracy and surface roughness of each lens of the AMLA were less than 0.2 μm and 5 nm, respectively. Gao et al [20] proposed a tool setting method for tool replacement in the fabrication process of a microstructure array over a roll workpiece using a force sensor integrated FTS on a precision lathe. The new tool can be set with sub-micrometre accuracy based on the identified position of the tool tip with respect to the reference area.…”

Section: Introductionmentioning

confidence: 99%