2007
DOI: 10.1016/j.cap.2006.09.018
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Prediction of surface microtrenching by using neural network

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Cited by 4 publications
(1 citation statement)
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“…To this end, there have been many papers in the literature describing both the end result of an etch and virtual metrology modeling for plasma etch operations. Early examples include [1][2][3][4][5][6]. More recently are [7][8][9].…”
Section: Significancementioning
confidence: 99%
“…To this end, there have been many papers in the literature describing both the end result of an etch and virtual metrology modeling for plasma etch operations. Early examples include [1][2][3][4][5][6]. More recently are [7][8][9].…”
Section: Significancementioning
confidence: 99%