Prediction of the thermal sensitivity of surface acoustic waves excited under a periodic grating of electrodes

Geometric Nonlinear Model for Prediction of Frequency–Temperature Behavior of SAW Devices for Nanosensor Applications

“…The authors would like to thank Weibiao Wang from the Research and Development Department, Shoulder Electronics Limited, Wuxi Jiangsu, for his strong support in experiments. We are also very grateful to the authors, Pastureaud et al [20]. Experiment data of LT resonator is from their publications.…”

“…It is known that a leaky acoustic surface wave propagates on the surface of a semi-infinite piezoelectric substrate with bulk acoustic waves radiating into the substrate, but the leaky wave excited on lithium tantalate (42 • Y-X LT) or LST quartz (17 • Y-X quartz) is usually utilized for most radio-frequency designs [20,27]. In this work, a half-wavelength FEM model of the thermal sensitivity used a 42 • Y-X LT thin plate as the piezoelectric substrate, with a thickness of 3 λ, and PML with a thickness of 2 λ was modeled.…”

“…As shown in Figure 10, the experimental data taken from Pastureaud et al [20] and the numerical result calculated by the FEA/BIM method were compared. It was found that the simulation results calculated by the GN-FEM model are more consistent with the experimental data than those of the FEA/BIM model.…”

“…The frequency-temperature characteristic of surface acoustic waves excited on piezoelectric substrates has been studied using different methods [17][18][19][20]. During the early stage of research, studies were mainly concerned with the dependency of crystal cuts and propagation directions on temperature in a SAW device [21,22].…”

“…Yong et al [18,24,25] studied the frequency-temperature behavior of quartz by means of building piezoelectric Lagrangian equations performed with the two-dimensional periodic finite element method (2D-FEM) model and three-dimensional FEM model (3D-FEM) of a SAW structure. Finite element analysis (FEA) and a boundary integral method (BIM) were developed by Pastureaud et al [20], where Green's function and harmonic admittance as a function of the temperature and an infinite and periodic structure were assumed. Finite element analysis/the boundary element method (FEA/BEM) combined with material coefficient perturbation has been investigated by Garcia et al [26] based on a two-dimensional finite element analysis of periodic structures.…”