Prediction of the thermal sensitivity of surface acoustic waves excited under a periodic grating of electrodes

Pastureaud, T.; Ballandras, S.; Steichen, W.

doi:10.1109/ultsym.2003.1293388

Cited by 8 publications

(12 citation statements)

References 7 publications

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“…The measured TCF are reported in Table III and compared to theoretical predictions obtained using the wellknown Campbell & Jones approach [10] for semi-infinite crystals and transposed to the FEA-BIM model described in [4], neglecting stresses due to thermal differential expansion between the different layers of the devices and accounting for the electrode contribution to the thermal drift [11]. It is seen from this table that the theory generally overestimates the actual TCF, even if the scale order is rather well predicted.…”

Section: Mixed Matrix Parameters and Tcf Analysismentioning

confidence: 99%

GHz frequency ZnO/Si SAW device

Brizoual

Sarry

Elrnazria

et al. 2008

IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

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The demand for high-frequency low-loss filters generates intensive research on innovative wave guide solutions. In this work, a GHz SAW device based on a ZnO/Si structure was fabricated using classical UV photolithography. The thickness of the piezoelectric thin film was optimized and a specific interdigital transducer structure was used to generate third and fifth harmonic guided waves at 2.5 GHz and 3.5 GHz, respectively, with an aluminum strip larger than 1 micrometer. Different modes have been measured and theoretically identified thanks to an advanced finite-element/boundary-elementbased model. Good agreement is found between theory and experiments. The high-frequency modes have been fully characterized, allowing for accurate design of SAW devices exploiting such modes.

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Section: Mixed Matrix Parameters and Tcf Analysismentioning

confidence: 99%

GHz frequency ZnO/Si SAW device

Brizoual

Sarry

Elrnazria

et al. 2008

IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

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“…In order to take into account the temperature variations, we use the same method as Pastureaud [2]. First of all, the temperature dependence is taken into account up to the third order according Bechmann et al paper [3].…”

Section: Let Us Definementioning

confidence: 99%

“…According to Pastureaud [2], in the y axis perpendicular to the x axis ( fig. 1), the thermal expansion is supposed to be the aluminum thermal expansion and the normalized electrode thickness temperature variation follow the rule:…”

Section: Let Us Definementioning

confidence: 99%

Optimized STW devices with buried electrodes based on a mixed FEM/BEM numerical model

Ventura¹,

Dufilie²,

Hecht

2011

2011 IEEE International Ultrasonics Symposium

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STW resonators on quartz are preferred over SAW due to their superior acceleration sensitivity, power handling, improved aging behavior, and 60% higher velocity. The achieved resonator Q at high frequencies using a metallic grating is lower than expected, mainly due to bulk mode scattering losses. The purpose of this study is to find the grating geometry which can reduce the propagation attenuation of the STW. STW propagation on Y+α°, X+90° propagation quartz cut (Euler angles 0,90-α,90) has been examined using a mixed FEM/BEM numerical model developed for buried electrodes for SAW propagation. It was found that by adjusting the a/p of the metal strips and by partially burying the electrodes one obtains SAWlike propagation properties with low propagation attenuation. For practical device design it is also necessary to be able to predict the turn-over temperature. To this end, simplified assumptions have been made to model the electrode and the piezoelectric substrate dilatations with temperature, and incorporated in the mixed FEM/BEM numerical model PerIDT presented at last year's Ultrasonics Symposium. The optimized partially buried strip structure is used to obtain STW resonators with increased Q with predicted turnover temperature. Comparison with experiments will be shown. Partially buried electrode STW resonators with improved Q have been developed with the aid of the mixed FEM/BEM numerical model PerIDT.I.

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“…The frequency–temperature characteristic of surface acoustic waves excited on piezoelectric substrates has been studied using different methods [ 17 , 18 , 19 , 20 ]. During the early stage of research, studies were mainly concerned with the dependency of crystal cuts and propagation directions on temperature in a SAW device [ 21 , 22 ].…”

Section: Introductionmentioning

confidence: 99%

“…Yong et al [ 18 , 24 , 25 ] studied the frequency–temperature behavior of quartz by means of building piezoelectric Lagrangian equations performed with the two-dimensional periodic finite element method (2D-FEM) model and three-dimensional FEM model (3D-FEM) of a SAW structure. Finite element analysis (FEA) and a boundary integral method (BIM) were developed by Pastureaud et al [ 20 ], where Green’s function and harmonic admittance as a function of the temperature and an infinite and periodic structure were assumed. Finite element analysis/the boundary element method (FEA/BEM) combined with material coefficient perturbation has been investigated by Garcia et al [ 26 ] based on a two-dimensional finite element analysis of periodic structures.…”

Section: Introductionmentioning

confidence: 99%

Geometric Nonlinear Model for Prediction of Frequency–Temperature Behavior of SAW Devices for Nanosensor Applications

Chen

Zhang

et al. 2020

Sensors

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Surface acoustic wave (SAW)-based sensors have become highly valued for their use as nanosensors in industrial applications. Accurate prediction of the thermal stability is a key problem for sensor design. In this work, a numerical tool based on the finite element method combined with piezoelectric Lagrangian equations has been developed to accurately predict the thermal sensitivity characteristics of surface acoustic wave devices. Theoretical analysis for the geometric nonlinearity contributing to the frequency–temperature characteristic and material constants’ dependency on temperature were taken into consideration. The thermomechanical equilibrium equation built on the three-dimensional finite element method (3D-FEM) mesh node took mesh movement into account because thermal expansion was employed. The frequency–temperature characteristics of different SAW modes, including Rayleigh waves and leaky waves excited on a piezoelectric substrate of quartz or lithium tantalate, respectively, were calculated. The theoretical accuracy of the proposed numerical tool was verified by experiments.

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Prediction of the thermal sensitivity of surface acoustic waves excited under a periodic grating of electrodes

Cited by 8 publications

References 7 publications

GHz frequency ZnO/Si SAW device

GHz frequency ZnO/Si SAW device

Optimized STW devices with buried electrodes based on a mixed FEM/BEM numerical model

Geometric Nonlinear Model for Prediction of Frequency–Temperature Behavior of SAW Devices for Nanosensor Applications

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