Preferred orientations in polycrystalline SnO2 films grown by atmospheric pressure chemical vapor deposition

Korotkov, R. Y.; Ricou, P.; Farrán, Adriana

doi:10.1016/j.tsf.2005.07.248

Cited by 86 publications

(55 citation statements)

References 14 publications

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“…Variation in the growth rate in polycrystalline samples as a function of thickness is often attributed to the crystallographic changes occurring in the films. 15 The dependence of both the film thickness and substrate temperature on crystallographic growth direction of SnO 2 was also found to be significant. The crystal structures in all cases were, however, the tetragonal cassiterite structure.…”

Section: Sem and Eds Analysismentioning

confidence: 87%

The effect of substrate temperature on the microstructural properties of nanocrystalline tin oxide coatings produced by APCVD

2009

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Tin oxide thin films were grown by chemical vapor deposition on glass substrates at atmospheric pressure and temperatures of 400, 500, and 600°C over deposition times from 15 to 60 min with 15-min intervals to investigate the effect of deposition time. A homemade horizontal reactor was used for deposition from SnCl 2 + 2H 2 O precursors with pure oxygen flowing at a rate of 5 ccpm. The structure was analyzed by X-ray diffraction (XRD), scanning electron microscopy, and atomic force microscopy techniques to reveal the deposition mechanisms and crystalline structures. XRD analysis showed that the predominant phase in all experimental conditions was SnO 2 . From the XRD analysis, it is understood that the preferred orientation of the SnO 2 films is dependent on their thickness, which is affected by deposition time and substrate temperature.

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Section: Sem and Eds Analysismentioning

confidence: 87%

The effect of substrate temperature on the microstructural properties of nanocrystalline tin oxide coatings produced by APCVD

2009

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“…The calculated size is 22.44 nm, which is in accordance with TEM studies. Preferred orientation of ZrC crystal was calculated with Haris method from the XRD results according to the following relationship [29,30]:…”

Section: Resultsmentioning

confidence: 99%

Preparation of ZrC nano-particles reinforced amorphous carbon composite coating by atmospheric pressure chemical vapor deposition

Sun

Xiong

Huang

et al. 2009

Applied Surface Science

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“…SnO 2 film is used in many applications, such as gas sensor [19] and transparent electrode [16]. Several chemical and physical methods, such as sol-gel [20], ultrasonic spray pyrolysis [21], chemical vapor deposition [22], pulsed laser deposition [23], and sputtering [24], have been used to prepare SnO 2 film. Among them, the reactive sputtering deposition has shown the advantages of controlling the crystalline orientation, growing temperatures, interfacial adhesion to the substrate, and density of the grown film.…”

Section: Introductionmentioning

confidence: 99%

Sensing performance of SnO2 film fabricated by sputtering deposition

2015

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The effects of in situ-deposition temperature and post-deposition annealing on the microstructure of the sputtered SnO 2 thin film are studied. These effects on the performance of the resulting gas-sensing devices have been characterized. For in situ-deposition temperature, the film was deposited on a heated substrate, while for post-deposition annealing, the film was deposited on an unheated substrate and then annealed it at various temperatures. Microstructure changes in SnO 2 film were induced at various temperatures. Both films of in situ heating and post-annealing evoked only partial crystallization, especially at low temperatures, and the crystallinity was enhanced with high temperatures. SEM images confirmed that the grains and pores of the film changed with the thermal treatment. In consequence of the post-annealing, the pores grew wider; however, they grew narrow in the case of in situ heating. The film annealed at low temperature yielded high-response device to NO 2 gas compared with that annealed at higher temperature. The sensing devices fabricated by in situ deposition showed highest response.

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Preferred orientations in polycrystalline SnO2 films grown by atmospheric pressure chemical vapor deposition

Cited by 86 publications

References 14 publications

The effect of substrate temperature on the microstructural properties of nanocrystalline tin oxide coatings produced by APCVD

The effect of substrate temperature on the microstructural properties of nanocrystalline tin oxide coatings produced by APCVD

Preparation of ZrC nano-particles reinforced amorphous carbon composite coating by atmospheric pressure chemical vapor deposition

Sensing performance of SnO2 film fabricated by sputtering deposition

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