The compositionally graded Ba(Zr x Ti 1−x )O 3 films with a compositional gradient from BaTiO 3 to BaZr 0.35 Ti 0.65 O 3 were fabricated on LNO-buffered Pt/Ti/ SiO 2 /Si substrates by a sol-gel deposition method. In order to confirm the compositional gradient, a combination of Xray Photoelectron Spectroscopy (XPS) and Ar ion etching was employed to produce the composition depth profile. Dielectric constant peaks, common to a ferroelectric transition, were not observed in the temperature range from −50 to 100°C, within which the dielectric constant showed negligible temperature dependence. The compositionally graded Ba(Zr x Ti 1−x )O 3 thin films with weak temperature dependence of tunability could be attractive materials for situations in which precise control of temperature would be either impossible or too expensive.