Vanadium/titanium mixed oxide films were produced using the sol-gel route. The structural investigation revealed that increased TiO 2 molar ratio in the mixed oxide disturbs the V 2 O 5 crystalline structure and makes it amorphous. This blocks the TiO 2 phase transformation, so TiO 2 stabilizes in the anatase phase. In addition the surface of the sample always presents larger amounts of TiO 2 than expected, revealing a concentration gradient along the growth direction. For increased TiO 2 molar ratios the roughness of the surface is reduced. Ion sensors were fabricated using the extended gate field effect transistor configuration. The obtained sensitivities varied in the range of 58 mV/pH down to 15 mV/pH according to the composition and morphology of the surface of the samples. Low TiO 2 amounts presented better sensing properties that might be related to the cracked and inhomogeneous surfaces. Rising the TiO 2 quantity in the films produces homogeneous surfaces but diminishes their sensitivities. Thus, the present paper reveals that the compositional and structural aspects change the surface morphology and electrical properties accounting for the final ion sensing properties of the V 2 O 5 /TiO 2 films.The development of the ion sensitive field effect transistor (ISFET) has been going on for almost 40 years. The device mimics a commercial MOSFET in which the metal gate electrode is removed, in order to expose the underlying insulator layer to the solution. Consequently, the gate insulator has the function of an ion selective electrode. 1 A modification to the ISFET configuration corresponds to the structure of the extended gate field effect transistor (EGFET), 2 which has a more flexible shape compared to ISFET, and also presents better long-term stability, since the ions from the chemical environment are excluded from any region close to the FET gate insulator. 3 The sensitive EGFET membrane is fabricated and attached to the end of the FET gate electrode. 2 Several kinds of materials and structures have been applied as the pH-sensing part of the EGFET. Among the materials used as membranes ruthenium oxide, 4 carbon nanotube, 5 SnO 2 , 6 ZnO 7 and V 2 O 5 xerogel 8 can be cited. In the search for alternative ion-sensing membranes to be employed in pH sensors, vanadium oxide stands out. This is because this transition-metal possesses a large number of oxidation states with possible redox-active properties. 9 The mixed oxide V 2 O 5 /WO 3 obtained by the sol-gel method has also been utilized as pH-sensor. It exhibited higher sensitivity than pure V 2 O 5 and underwent less degradation with continuous usage. 10 The best response was obtained for a 5% WO 3 molar ratio, for which the device worked linearly with the highest sensitivity. 10 Above 5% WO 3 molar ratio, the vanadium pentoxide seemed to dominate the process for acid solutions, while the tungsten oxide appeared to dominate in the case of basic solutions, giving rise to a non-linear EGFET response and decreased sensitivity. 10 The titanium oxide is also a v...