1997
DOI: 10.1016/s0254-0584(96)01899-8
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Preparation and characterization of transparent conducting tin oxide thin film electrodes by chemical vapour deposition from reactive thermal evaporation of SnCl2

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Cited by 34 publications
(13 citation statements)
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“…[3][4][5][6][7][8] Various methods, including RF sputtering, electron beam evaporation, spray pyrolysis, photochemical vapor deposition, the sol-gel method, and atmospheric pressure chemical vapor deposition (APCVD), have been used to deposit these films. 6,7,[9][10][11][12][13] In the conventional chemical vapor deposition (CVD) process, gaseous precursors are transported to a reactor chamber, where they react under the influence of a heated substrate, resulting in a solid film on the substrate. The reactions can take place both in the gas-phase above the substrate and on the surface of the substrate.…”
Section: Introductionmentioning
confidence: 99%
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“…[3][4][5][6][7][8] Various methods, including RF sputtering, electron beam evaporation, spray pyrolysis, photochemical vapor deposition, the sol-gel method, and atmospheric pressure chemical vapor deposition (APCVD), have been used to deposit these films. 6,7,[9][10][11][12][13] In the conventional chemical vapor deposition (CVD) process, gaseous precursors are transported to a reactor chamber, where they react under the influence of a heated substrate, resulting in a solid film on the substrate. The reactions can take place both in the gas-phase above the substrate and on the surface of the substrate.…”
Section: Introductionmentioning
confidence: 99%
“…A similar setup was also used by Yadava et al 13 for the growth of SnO 2 films. In their setup, a nozzle was used to direct the SnCl 2 + 2H 2 O vapors onto substrates instead of the funnel used in this study.…”
Section: Introductionmentioning
confidence: 99%
“…Tin dioxide (SnO 2 ), an n-type semiconductor with a band gap of 3.6 eV at 300 K, has been widely utilized in many fields such as dye-sensitized solar cells [10], gas sensors for detecting leakage [1][2][3][4]9], transparent conducting electrodes [11], catalyst supports and electrochemical modifiers on electrodes, etc [12][13][14][15]. Recently, one-dimensional (1D) nanostructures such as nanobelts, nanofibers and nanowires have attracted much attention because of their high ratio of specific surface area and electronic structural changes due to quantum confinement.…”
Section: Introductionmentioning
confidence: 99%
“…Thin films of SnO 2 are used in a wide range of applications, e.g., electrodes in electroluminescent displays, imaging devices, protective coatings, antireflection coatings, gas and chemical sensors, transducers and applications based on transparent conductors, including heating windows for aircraft and cars and incandescent lamps, solar cells and other opto-electronic devices [3][4][5][6][7][8]. Various methods, including RF sputtering, electron beam evaporation, spray pyrolysis, photochemical vapor deposition, the sol-gel method and atmospheric pressure chemical vapor deposition (APCVD), have been used to deposit these films [6,7,[9][10][11][12][13][14].…”
Section: Introductionmentioning
confidence: 99%