1996
DOI: 10.1016/s0921-5093(96)10303-8
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Preparation and Raman study of B-doped Si microcrystals

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Cited by 6 publications
(6 citation statements)
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“…In our previous work, we have studied B-doped nc-Si as small as 8 nm in diameter by Raman spectroscopy. 5,6 We demonstrated that, under blue excitation, the nanocrystals show a broad Raman peak with a tail towards the low-energy side of the peak due to phonon confinement effects. As the excitation wavelength was increased, the spectral shape changed gradually and under the excitation of 676.5 nm light, we observed an asymmetric peak with a tail towards the high-energy side of the peak.…”
Section: Resultsmentioning
confidence: 79%
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“…In our previous work, we have studied B-doped nc-Si as small as 8 nm in diameter by Raman spectroscopy. 5,6 We demonstrated that, under blue excitation, the nanocrystals show a broad Raman peak with a tail towards the low-energy side of the peak due to phonon confinement effects. As the excitation wavelength was increased, the spectral shape changed gradually and under the excitation of 676.5 nm light, we observed an asymmetric peak with a tail towards the high-energy side of the peak.…”
Section: Resultsmentioning
confidence: 79%
“…The B-doped nc-Si were prepared by the cosputtering method. 5,6 Small pieces of Si chips (5ϫ15 mm 2 ) and B 2 O 3 pellets ͑10 mm in diameter͒ were placed on a SiO 2 sputtering target ͑10 cm in diameter͒ and they were cosputtered in Ar gas of 2.7 Pa. Films about 2 m in thickness were deposited on fused quartz plates and Si wafers.…”
Section: Methodsmentioning
confidence: 99%
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“…A solubility of small boron atoms in the silicon matrix is surprisingly low (usually below 0.5 at. %). Thus, creating Si 1– x B x alloys with the diamond-type structure is technically challenging. In addition, there are difficulties in quantitative determination of boron content in Si 1– x B x by conventional chemical and microscopic techniques.…”
Section: Introductionmentioning
confidence: 99%