Preparation of {001}&lt;sub&gt;c&lt;/sub&gt;-oriented epitaxial (K, Na)NbO&lt;sub&gt;3&lt;/sub&gt; thick films by repeated hydrothermal deposition technique

Shiraishi, Takahisa; Ito, Yoshiharu; Ishikawa, Mutsuo; Uchida, Hiroshi; Kiguchi, Takanori; Kurosawa, Minoru Kuribayashi; Funakubo, Hiroshi; Konno, Toyohiko J.

doi:10.2109/jcersj2.17251

Cited by 9 publications

(6 citation statements)

References 34 publications

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“…It is already investigated that the film thickness can increase easily by repeating the batch process, maintaining the same composition and crystal structure in the hydrothermal process. [36][37][38] This means that the heat-treated film at 600 °C hardly changed its property by the additional hydrothermal deposition process, maintaining its nonpolarized state. (It is ascertained but not shown here.)…”

Section: Resultsmentioning

confidence: 99%

Thermal stability of self-polarization in a (K,Na)NbO₃ film prepared by the hydrothermal method

Tateyama

Ito

Shiraishi

et al. 2021

Jpn. J. Appl. Phys.

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Herein, the systematic change in the self-polarization behavior against the post-heat treatment after film deposition was investigated to understand the origin of self-polarization in hydrothermally prepared (K x Na 1−x )NbO 3 films with x = 0.88 at 240 °C below the Curie temperature. The transverse piezoelectric constant, e 31,f , was evaluated by the cantilever method. The as-prepared films and heat-treated films at 300 °C had an almost perfectly self-polarized state and showed e 31,f of ∼−5.0 C m −2 without applying an electric field as a poling treatment. Also, the piezoelectric response shows good linearity with the asymmetric piezoelectric butterfly curves, showing imprint characteristics. The self-polarized states were maintained until the heat treatment above the Curie temperature. Moreover, the self-polarized film was successfully deposited on the post-heattreated film without the self-polarized state. This result suggests that the self-polarized state is generated regardless of the polarized state of the underlying layer by the hydrothermal synthesis in which deposition temperature is below the Curie temperature.

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Section: Resultsmentioning

confidence: 99%

Thermal stability of self-polarization in a (K,Na)NbO₃ film prepared by the hydrothermal method

Tateyama

Ito

Shiraishi

et al. 2021

Jpn. J. Appl. Phys.

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“…However, it is always challenging to fabricate high‐quality and uniform KNN‐based films with stoichiometric compositions due to the complexity of the film composition and the volatilization of K and Na elements at high temperatures. Nevertheless, several techniques have been utilized to overcome the initial difficulties to prepare the KNN‐based epitaxial films, for example, PLD, RF magnetron sputtering, sol–gel, HT, and metal organic chemical vapor deposition (MOCVD) …”

Section: Epitaxial Filmsmentioning

confidence: 99%

Potassium‐Sodium‐Niobate‐Based Thin Films: Lead Free for Micro‐Piezoelectrics

et al. 2019

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Extensive research and great progress of (K,Na)NbO 3 (KNN)-based lead-free piezoelectric films have been driven by the current legislation and the requirement for sustainable development of society and environment in the applications of microelectromechanical systems. A comprehensive discussion of the recent achievement in KNN-based films is presented herein. First, the available synthetic techniques, chemical modification, the ferroelectric and piezoelectric properties of KNN-based films are reviewed, followed by an introduction of the crystal structures and electrical properties of KNN-based epitaxial films in comparison with the bulk ceramics. Finally, the applications of KNN-based films for the sensors, the energy harvesters, and energy storage devices are addressed, and current challenges and prospects for future work are discussed.

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“…29,30) Moreover, low-temperature deposition using the hydrothermal process allows the growth of thicker films due to smaller thermal strain. [31][32][33] In general, the thick film needs high voltage to align the direction of polarization by applying an electric field, called the poling process. 15) However, hydrothermally synthesized (K,Na)NbO 3 film has a self-polarized state in which the polarization direction is self-aligned, as discussed previously.…”

Section: Introductionmentioning

confidence: 99%

Effect of film thickness on output power of a piezoelectric vibration energy harvester using hydrothermally synthesized (K,Na)NbO₃ film

Tateyama¹,

Ito²,

Shiraishi³

et al. 2023

Jpn. J. Appl. Phys.

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The dependence of the output power of piezoelectric vibration energy harvesters on film thickness was systematically investigated using {100}c-oriented epitaxial (K,Na)NbO3 films prepared on single-crystal SrTiO3 substrates by the hydrothermal deposition technique. First, we measured the vibration energy harvesting properties by a unimorph Pt/(K,Na)NbO3//SrRuO3//SrTiO3 cantilever. Based on the fact that the elastic stiffness of (K,Na)NbO3 is lower than that of SrTiO3 substrate, it can be understood that increasing film thickness leads to decreasing Qm, resulting in the decrease in output power as film thickness increased under the same input acceleration condition. In the next step, these cantilevers were attached to an Al plate having a much larger volume than the Pt/(K,Na)NbO3//SrRuO3//SrTiO3 cantilever. The output power of this type of harvester was more than 400% greater when the film thickness was increased from 3.5 μm to 22.3 μm due to the almost constant Q m value.

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Preparation of {001}<sub>c</sub>-oriented epitaxial (K, Na)NbO<sub>3</sub> thick films by repeated hydrothermal deposition technique

Cited by 9 publications

References 34 publications

Thermal stability of self-polarization in a (K,Na)NbO₃ film prepared by the hydrothermal method

Thermal stability of self-polarization in a (K,Na)NbO₃ film prepared by the hydrothermal method

Potassium‐Sodium‐Niobate‐Based Thin Films: Lead Free for Micro‐Piezoelectrics

Effect of film thickness on output power of a piezoelectric vibration energy harvester using hydrothermally synthesized (K,Na)NbO₃ film

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Preparation of {001}<sub>c</sub>-oriented epitaxial (K, Na)NbO<sub>3</sub> thick films by repeated hydrothermal deposition technique

Cited by 9 publications

References 34 publications

Thermal stability of self-polarization in a (K,Na)NbO3 film prepared by the hydrothermal method

Thermal stability of self-polarization in a (K,Na)NbO3 film prepared by the hydrothermal method

Potassium‐Sodium‐Niobate‐Based Thin Films: Lead Free for Micro‐Piezoelectrics

Effect of film thickness on output power of a piezoelectric vibration energy harvester using hydrothermally synthesized (K,Na)NbO3 film

Contact Info

Product

Resources

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Thermal stability of self-polarization in a (K,Na)NbO₃ film prepared by the hydrothermal method

Thermal stability of self-polarization in a (K,Na)NbO₃ film prepared by the hydrothermal method

Effect of film thickness on output power of a piezoelectric vibration energy harvester using hydrothermally synthesized (K,Na)NbO₃ film