2000
DOI: 10.1016/s0169-4332(00)00216-6
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Preparation of a 10 nm thick single-crystal silicon membrane self-supporting over a diameter of 1 mm

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Cited by 17 publications
(16 citation statements)
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“…The contribution from carbon substrate could easily be subtracted from the spectrum, while (e,2e) events occurring deeper within the target (non-shaded area) contribute mainly to the background intensity. The thickness of solid targets must not exceed about 10 nm, otherwise, background events due to multiple scattering in the target dominate the (e,2e) signal [36].…”
Section: (E2e) Spectrometermentioning
confidence: 99%
“…The contribution from carbon substrate could easily be subtracted from the spectrum, while (e,2e) events occurring deeper within the target (non-shaded area) contribute mainly to the background intensity. The thickness of solid targets must not exceed about 10 nm, otherwise, background events due to multiple scattering in the target dominate the (e,2e) signal [36].…”
Section: (E2e) Spectrometermentioning
confidence: 99%
“…The substrate preparation procedure was described elsewhere for both Si 16 and Cu 8 and the final thickness of the thin single crystal substrates was around 100Å. However, owing to the statistical nature of sputtering, the thickness is not expected to be homogenous.…”
Section: Methodsmentioning
confidence: 99%
“…For thicker targets the signal is swamped by multiple scattering of the electrons. Although we have been able to produce 6 nm thick single-crystal free-standing targets of silicon 31 , it is difficult to do the same for alkali oxide targets. Instead, we exploit the relative surface sensitivity of the spectrometer afforded by the low ejected electron energy, and prepare samples by evaporation onto a 3 nm thick amorphous carbon substrate.…”
Section: B Sample Preparationmentioning
confidence: 99%