Preparation of BaTiO3 thin films by backside pulsed ion-beam evaporation

Sonegawa, T.; Grigoriu, C.; Masugata, Katsumi; Yatsui, Kiyoshi; Shimotori, Y.; Furuuchi, S.; Yamamoto, Hironori

doi:10.1063/1.117162

Cited by 33 publications

(5 citation statements)

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“…This agrees with the proposed model in which capacitance is determined by temperature-independent grain-boundary capacitance. ,, The bulk capacitance, which presumably follows the Curie−Weiss law, is expected to show up at a much higher frequency than we were able to attain with our setup. The effective dielectric constant of the films showed a characteristic dispersion with frequency (Figure ) and was equal to 20−25 at 10 kHz, consistent with the values reported previously. ,,, Sawyer−Tower polarization measurements showed paraelectric behavior, as might be expected in view of the structural data, and large leakage currents were observed. Similar behavior for amorphous and polycrystalline BaTiO 3 films led the authors to conclude the amorphous grain-boundary layer had a low dielectric constant and high dielectric losses.…”

Section: Resultssupporting

confidence: 90%

“…The XRD peak positions in Figure also indicate that annealing caused a small decrease in crystal lattice parameters. Similar behavior was observed for barium titanate films prepared by sol−gel deposition , and ion-beam evaporation . It is typically associated with temperature-induced grain growth that removes grain size effects and permits formation of the tetragonal phase.…”

Section: Resultssupporting

confidence: 56%

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Properties of Dielectric BaTiO₃ Thin Films Prepared by Spray Pyrolysis

1998

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Thin-film BaTiO 3 has been prepared for the first time by spray pyrolysis. Both smooth and highly porous films were deposited depending on deposition temperature and rate. Asdeposited films contained an unidentified, low-symmetry barium titanate modification. Annealing at 500-900 °C converted the films to the cubic phase, while annealing at 1000 °C produced the tetragonal phase and an increase in the grain size. As-deposited and annealed films were highly dielectric with DC resistivity in the 10 10 -10 12 Ω‚cm range. AC resistivity decreased with frequency following a power-law dependence with an exponent of -0.6 to -0.7. Both resistivity and capacitance remained stable at temperatures to 400 °C. The effective dielectric constant (20-25 at 10 kHz) was possibly determined by amorphous grain-boundary region with high density of traps.

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Section: Resultssupporting

confidence: 90%

Section: Resultssupporting

confidence: 56%

Properties of Dielectric BaTiO₃ Thin Films Prepared by Spray Pyrolysis

1998

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“…Intense pulsed ion beam (IPIB), invented as ignition technique for inertial confinement fusion (ICF) [1], has been intensively researched for various applications such as nanopowder synthesis [2,3], film deposition [4,5], surface modification [6,7] and simulation of high thermal load for nuclear fusion [8]. When IPIB with high-power density bombard on material, a fast temperature rise and decline are induced in the near-surface region of material, giving rise to melting, evaporation, and re-solidification.…”

Section: Introductionmentioning

confidence: 99%

Irradiation effect of intense pulsed ion beam on (TiZrNbTaCr)C

Zhang¹,

Chen²,

Stepanov³

et al. 2022

8th International Congress on Energy Fluxes and Radiation Effects

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Intense pulsed ion beam (IPIB), featured with pulsed high-power density, has been widely used in the modification of materials. The influence of IPIB irradiation on surface microstructure and phase structure of (TiZrNbTaCr)C ceramics was investigated in this work. Experiments were carried out using TEMP-4M accelerator with peak accelerating voltage, current density, and pulse duration (FWHM) of 220 kV, 150 A/cm2, and 80 ns respectively. Atomic force microscope (AFM), scanning electron microscope and Energy-dispersive X-ray spectroscopy (SEM-EDS), as well as X-ray diffraction (XRD) were used to analyze the surface microstructure and phase structure of (TiZrNbTaCr)C ceramics under IPIB irradiation. The AFM and SEM images showed that the grain size of (TiZrNbTaCr)C increased, and the size and quantity of holes decreased after IPIB irradiation which might improve the erosion resistance of material. After IPIB irradiation, the segregation of Cr and Ta elements were observed by EDS measurement. The phase structure stability of samples under IPIB irradiation was confirmed by XRD and the lattice parameters and crystal spacing was discussed as well.

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“…As one of the flexible, low-cost evaluation techniques, loading performance test is an important means of the development of the new first wall materials. HIPIB is a new technique developed in recent ten years [5,6] , the maximum heat flux parameters of single pulse of HIPIB can be achieved to 400Mwm -2 s 1/2 [7][8][9][10][11][12][13][14] , this almost covers the heat flux parameters of the current plans to build new nuclear fusion experimental device in the wall material by different time, including the boundary mode in the ITER design, the plasma rupture and other transient events happened in 100 microsecond, as well as to the heat load by ion flux bombarding divertor in 100s. Tungsten is one of the most probable materials for diverter armor with high boiling point and heat conductivity.…”

Section: Introductionmentioning

confidence: 99%

Numerical Study on the Bombardment Effects of Tungsten by High-Intensity Pulsed Ion Beam

2013

AMM

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In order to study the response of tungsten under high heat load, the nonlinear thermodynamic equations considering the phase transition were established to the tungsten target irradiated by intense pulsed ion beam. Also the equations which describe the thermal stress and the total strain produced by the changed temperature in the material element were built. Numerical method was used to solve the evolutions of the thermal stress field formed in the target, and spatial temporal evolutions of stress field in the tungsten target are obtained. While the ion current density reached 100A/cm2, the surface materials of tungsten target at the beam incident center was melted and then re-solidified due to the heat conduction after the end of a pulse. There exists the gradient of temperature in tungsten, therefore the thermal stress formed. Radial tensile stress is produced within the melting region, meanwhile outside the region compressive stress is formed; the boundary appears on the edge of the melting region. The stresses on the incidental surface of target are larger compared with the internal.

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Preparation of BaTiO3 thin films by backside pulsed ion-beam evaporation

Cited by 33 publications

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Properties of Dielectric BaTiO₃ Thin Films Prepared by Spray Pyrolysis

Properties of Dielectric BaTiO₃ Thin Films Prepared by Spray Pyrolysis

Irradiation effect of intense pulsed ion beam on (TiZrNbTaCr)C

Numerical Study on the Bombardment Effects of Tungsten by High-Intensity Pulsed Ion Beam

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Preparation of BaTiO3 thin films by backside pulsed ion-beam evaporation

Cited by 33 publications

References 0 publications

Properties of Dielectric BaTiO3 Thin Films Prepared by Spray Pyrolysis

Properties of Dielectric BaTiO3 Thin Films Prepared by Spray Pyrolysis

Irradiation effect of intense pulsed ion beam on (TiZrNbTaCr)C

Numerical Study on the Bombardment Effects of Tungsten by High-Intensity Pulsed Ion Beam

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Properties of Dielectric BaTiO₃ Thin Films Prepared by Spray Pyrolysis

Properties of Dielectric BaTiO₃ Thin Films Prepared by Spray Pyrolysis