The Thermal Boundary Conductance (TBC) between thin films of Cr, Mo, Nb and W and diamond substrates has been measured using time domain thermoreflectance before and after a high-vacuum heat treatment at 800 o C for 2 h. While no signs of carbide formation could be detected in as-deposited layers by Scanning Transmission Electron Microscopy Energy Dispersive Xray spectroscopy (STEM-EDX) elemental analysis, the heat treatment led to partial (W, Mo) or full conversion (Cr, Nb) of the film into carbide. The measured TBC values on as-deposited samples of 315, 220, 220 and 205 MWm −2 K −1 measured for, respectively, the Cr, Mo, Nb and W samples, were found to not be significantly altered by the heat treatment.