Preparation of cubic boron nitride film by CO2 laser physical vapour deposition with simultaneous nitrogen ion supply

Mineta, Shinei; Kohata, Mamoru; Yasunaga, Nobuo; Kikuta, Yoshikazu

doi:10.1016/0040-6090(90)90033-a

Cited by 72 publications

(5 citation statements)

References 11 publications

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“…Wada and Yamashita 182 reported a HV value around 4500-5500 kg mm 22 at 10 g load in 4000 A ˚thick film. Similarly, Mineta et al 183 reported values in the range of 3800-4600 kg mm 22 at 25 g load for 1 . 5 mm thick film (Table 4).…”

Section: Hardnessmentioning

confidence: 82%

Review of synthesis and properties of cubic boron nitride (c-BN) thin films

Samantaray¹,

Singh²

2005

International Materials Reviews

127

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Cubic boron nitride (c-BN) thin films are of significant interest because of their diamond like structure and properties. c-BN shows high thermal conductivity, chemical inertness against ferrous metals even at high temperatures, wide band gap, and good transmittance over a wide spectral range from UV to visible. Applications of c-BN include hard protective coatings for cutting tools, in optical instruments as UV detectors, as emitters, and in high temperature electronic devices. However, synthesis of phase pure c-BN thin films continues to be very challenging. The present study reviews the current status of the synthesis, characterisation, mechanical, electrical, and optical properties of c-BN thin films. Both physical and chemical vapour deposition methods used for the preparation of the c-BN films are covered. In addition, different nucleation and growth models of c-BN formation and growth on different substrates are described. The influence of process parameters such as ion energy, growth temperatures, chemical precursors, bias, and impurities on the nucleation and growth is reviewed. Mechanical properties including hardness, elastic modulus, and stiffness of c-BN films are discussed. The latest developments in electrical properties of the c-BN films based on metal-insulatorsemiconductor (MIS) hetero-structures, interface states, impurity states, conduction mechanism, field emission properties, and negative electron affinity (NEA) are presented. The optical properties and cathodoluminescence characteristics of BN films are also discussed.

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Section: Hardnessmentioning

confidence: 82%

Review of synthesis and properties of cubic boron nitride (c-BN) thin films

Samantaray¹,

Singh²

2005

International Materials Reviews

127

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“…Therefore, regarding the three ablation cases of Nd:YAG laser and Ti:sapphire laser ͑low and high fluence regimes͒, we perform XPS analysis of the ablated surface to investigate whether the boron layer is formed or not. The laser fluence of the Nd:YAG laser is 0.49 J/cm 2 respectively. It is seen from Figs.…”

Section: Resultsmentioning

confidence: 99%

“…There are many reports that BN crystal thin film is fabricated using the CO 2 laser, the KrF excimer laser, and the Nd:YAG laser by physical vapor deposition and pulsed laser deposition. [2][3][4][5][6] In addition, thin film fabrication of BN ceramic 7 and ablation of BN ceramic by the microsecond pulsed CO 2 laser 8 are reported.…”

Section: Introductionmentioning

confidence: 99%

Ablation characteristics of cubic-boron nitride ceramic with femtosecond and picosecond laser pulses

Hirayama

Obara

2001

Journal of Applied Physics

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Articles you may be interested inHydrogenation of fragment cations produced by femtosecond laser ablation of boron nitride Picosecond laser structuration under high pressures: Observation of boron nitride nanorods J. Appl. Phys. 104, 093504 (2008); 10.1063/1.3000457 Femtosecond and ultraviolet laser irradiation of graphitelike hexagonal boron nitride J. Appl. Phys. 96, 4483 (2004); 10.1063/1.1787909Deposited well-crystallized cubic boron nitride films by pulsed plasma enhanced chemical vapor deposition at room temperature Selective ablation of AlN ceramic using femtosecond, nanosecond, and microsecond pulsed laser

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“…First, the preparation of high-quality c -BN presents a significant challenge, even more difficult than the synthesis of diamond due to the very different electronegativity of boron and nitrogen . Most of the previously fabricated nanofilms, either by physical or by chemical vapor deposition − techniques, are usually in polycrystalline form and adhered by amorphous or turbostratic BN around crystal domains. , Yet for practical applications, it is optimal to have c -BN nanofilms with uniform crystallization and designable thickness. Second, c -BN is intrinsically an insulator with wide energy gap over 6 eV, which is far beyond the gap values (<3 eV) desired for most of the current electronic and optical devices .…”

Section: Introductionmentioning

confidence: 99%

Fluorinating Hexagonal Boron Nitride into Diamond-Like Nanofilms with Tunable Band Gap and Ferromagnetism

2011

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Cubic boron nitride (c-BN) possesses a number of extreme properties rivaling or surpassing those of diamond. Especially, owing to the high chemical stability, c-BN is desired for fabricating electronic devices that can stand up to harsh environments. However, realization of c-BN-based functional devices is still a challenging task due largely to the subtlety in the preparation of high-quality c-BN films with uniform thickness and controllable properties. Here, we present a simple synthetic strategy by surface fluorination of few-layered hexagonal boron nitride (h-BN) sheets to produce thermodynamically favorable F-terminated c-BN nanofilms with an embedded N-N bond layer and strong inbuilt electric polarization. Due to these specific features, the fluorinated c-BN nanofilms have controllable band gap by thickness or inbuilt and applied electric fields. Especially, the produced nanofilms can be tuned into substantial ferromagnetism through electron doping within a reasonable level. The electron-doping-induced deformation ratio of the c-BN nanofilms is found to be 1 order of magnitude higher than those of carbon nanotubes and graphene. At sufficient high doping levels, the nanofilm can be cleaved peculiarly along the N-N bond layer into diamond-like BN films. As the proposed synthesis strategy of the fluorinated c-BN nanofilms is well within the reach of current technologies, our results represent an extremely cost-effective approach for producing high-quality c-BN nanofilms with tunable electronic, magnetic, and electromechanical properties for versatile applications.

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Preparation of cubic boron nitride film by CO2 laser physical vapour deposition with simultaneous nitrogen ion supply

Cited by 72 publications

References 11 publications

Review of synthesis and properties of cubic boron nitride (c-BN) thin films

Review of synthesis and properties of cubic boron nitride (c-BN) thin films

Ablation characteristics of cubic-boron nitride ceramic with femtosecond and picosecond laser pulses

Fluorinating Hexagonal Boron Nitride into Diamond-Like Nanofilms with Tunable Band Gap and Ferromagnetism

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