Preparation of Epitaxial MgO Films Deposited by RF Magnetic Sputtering on the IBAD-MgO Substrate

Luo, Qiang; Liu, Linfei; Xiao, Guina; Li, Yijie

doi:10.1007/s10948-014-2493-4

Cited by 4 publications

(2 citation statements)

References 20 publications

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“…As the deposition temperature gradually increased, both the out-of-plane and in plane textures were gradually optimized. When the deposition temperature reached 500°C, the biaxial texture of the epi-MgO films was Δω = 2.2° and ΔΦ = 4.8°, respectively It has been proposed that the grain size of MgO increases with the deposition temperatur [42]. The large self-epitaxial MgO grains can release the stress in the MgO films between the interface of IBAD-MgO and epi-MgO [43].…”

Section: Resultsmentioning

confidence: 99%

Preparation of MgO Self-Epitaxial Films for YBCO High-Temperature Coated Conductors

Yu,

Xue,

Zhong

et al. 2023

Micromachines

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Ion beam-assisted deposition (IBAD) has been proposed as a promising texturing technology that uses the film epitaxy method to obtain biaxial texture on a non-textured metal or compound substrate. Magnesium oxide (MgO) is the most well explored texturing material. In order to obtain the optimal biaxial texture, the actual thickness of the IBAD-MgO film must be controlled within 12nm. Due to the bombardment of ion beams, IBAD-MgO has large lattice deformation, poor texture, and many defects in the films. In this work, the solution deposition planarization (SDP) method was used to deposit oxide amorphous Y2O3 films on the surface of Hastelloy C276 tapes instead of the electrochemical polishing, sputtering-Al2O3 and sputtering-Y2O3 in the commercialized buffer layer. An additional homogeneous epitaxy MgO (epi-MgO) layer, which was used to improve the biaxial texture in the IBAD-MgO layer, was deposited on the IBAD-MgO layer by electron-beam evaporation. The effects of growth temperature, film thickness, deposition rate, and oxygen pressure on the texture and morphology of the epi-MgO film were systematically studied. The best full width at half maximum (FWHM) values were 2.2° for the out-of-plane texture and 4.8° for the in-plane texture for epi-MgO films, respectively. Subsequently, the LaMnO3 cap layer and YBa2Cu3O7-x (YBCO) functional layer were deposited on the epi-MgO layer to test the quality of the MgO layer. Finally, the critical current density of the YBCO films was 6 MA/cm2 (77 K, 500 nm, self-field), indicating that this research provides a high-quality MgO substrate for the YBCO layer.

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Section: Resultsmentioning

confidence: 99%

Preparation of MgO Self-Epitaxial Films for YBCO High-Temperature Coated Conductors

Yu,

Xue,

Zhong

et al. 2023

Micromachines

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“…However if the temperature is too high, interdiffusion between films and substrate can occur, which leads to a blurred interface and an increase of the in-plane FWHM value. [18] The effect of thickness on the growth of the CeO 2 layer was studied by keeping the substrate temperature at 550 ∘ C and varying the deposition time. Figure 3 shows the relationship between ∆𝜑 and the thickness of the PLD-CeO 2 layer on IBAD-MgO with ∆𝜑 around 7 ∘ .…”

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Fabrication of IBAD-MgO and PLD-CeO ₂ Layers for YBCO Coated Conductors

Liu

2015

Chinese Phys. Lett.

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MgO thin films with different textures are fabricated by the ion beam assisted (IBAD) method on the Y2O3/Al2O3 buffered C276 tape. Then a CeO2 layer is directly grown on the IBAD-MgO film by the pulsed laser deposition (PLD) method. Effects of IBAD-MgO texture, substrate temperature and thickness on the grain alignment of the CeO2 layer are investigated. Film characterization is performed by x-ray diffraction and atomic force microscopy. It is found that the orientation and texture degree of the CeO2 layer are very sensitive to the IBAD-MgO texture. By optimizing the IBAD-MgO texture, CeO2 has pure (002) orientation and excellent biaxial texture deposited in a broad substrate temperature range. In addition, the PLD-CeO2 layer has a thickness effect. Under the optimized experimental condition, the PLD-CeO2 layer has a high in-plane texture of Δ𝜑 = 2.9 ∘ and a smooth surface with an rms surface roughness of less than 2 nm. The critical current density 𝐽c of a 0.4-𝜇m-thick YBCO film deposited on the CeO2 layer is 6.25 × 10 6 A/cm 2 at 77 K and a self-field.

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Characterization of MgO/Al2O3 Composite Film Prepared by DC Magnetron Sputtering and Its Secondary Electron Emission Properties

Wang

Zhou

Wang

et al. 2018

Journal of Elec Materi

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Preparation of Epitaxial MgO Films Deposited by RF Magnetic Sputtering on the IBAD-MgO Substrate

Cited by 4 publications

References 20 publications

Preparation of MgO Self-Epitaxial Films for YBCO High-Temperature Coated Conductors

Preparation of MgO Self-Epitaxial Films for YBCO High-Temperature Coated Conductors

Fabrication of IBAD-MgO and PLD-CeO ₂ Layers for YBCO Coated Conductors

Characterization of MgO/Al2O3 Composite Film Prepared by DC Magnetron Sputtering and Its Secondary Electron Emission Properties

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Preparation of Epitaxial MgO Films Deposited by RF Magnetic Sputtering on the IBAD-MgO Substrate

Cited by 4 publications

References 20 publications

Preparation of MgO Self-Epitaxial Films for YBCO High-Temperature Coated Conductors

Preparation of MgO Self-Epitaxial Films for YBCO High-Temperature Coated Conductors

Fabrication of IBAD-MgO and PLD-CeO 2 Layers for YBCO Coated Conductors

Characterization of MgO/Al2O3 Composite Film Prepared by DC Magnetron Sputtering and Its Secondary Electron Emission Properties

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Fabrication of IBAD-MgO and PLD-CeO ₂ Layers for YBCO Coated Conductors