2018
DOI: 10.1016/j.matlet.2017.12.061
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Preparation of iodine containing diamond-like carbon films by trifluoroiodomethane

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Cited by 5 publications
(3 citation statements)
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“…In order to apply amorphous carbon film with such excellent properties to electronic devices, it is required to control conductivity, conduction type, and carrier density. Therefore, doping of several elements into amorphous carbon has been attempted, and some groups have reported the effects of iodine doping on amorphous carbon films [93][94][95][96][97]. However, the difference in the effect of iodine doping on hydrogenated amorphous carbon (a-C:H) films and hydrogenated amorphous carbon nitride (a-CN x :H) films has not been well investigated.…”
Section: Amorphous Carbon Nitridesmentioning
confidence: 99%
“…In order to apply amorphous carbon film with such excellent properties to electronic devices, it is required to control conductivity, conduction type, and carrier density. Therefore, doping of several elements into amorphous carbon has been attempted, and some groups have reported the effects of iodine doping on amorphous carbon films [93][94][95][96][97]. However, the difference in the effect of iodine doping on hydrogenated amorphous carbon (a-C:H) films and hydrogenated amorphous carbon nitride (a-CN x :H) films has not been well investigated.…”
Section: Amorphous Carbon Nitridesmentioning
confidence: 99%
“…Diamond-like carbon materials possess numerous excellent properties like high hardness, low wear, low friction coefficient, chemical inertness, and biocompatibility [ 22 , 23 , 24 ]. The carbon phase obtained in [ 5 ] is superhard as evidenced by the broadening of ruby fluorescence lines and its ability to indent diamond anvils.…”
Section: Introductionmentioning
confidence: 99%
“…Diamond like carbon (DLC) coating because of its special properties is one of the interesting subjects nowadays [7][8][9][10], while the first one was fabricated by Aisenberg and Chabot 50 years ago [11]. Some of the properties are low friction factor, high abrasion resistance, optical transparency, high hardness factor, heat stability, chemical neutral and biocompatibility [11,12].…”
Section: Introductionmentioning
confidence: 99%