Preparation of nanocrystalline diamond films for optical coating applications using a pulsed microwave plasma CVD method

Ong, T. P.; Chiou, Wen‐An; Chen, Fu‐Rong; Chang, Robert P. H.

doi:10.1016/0008-6223(90)90308-l

Cited by 10 publications

(12 citation statements)

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“…Beginning in the late 1980s, fine-grained, polycrystalline diamond films were grown for optical coatings, [9,10] thin membranes for X-ray windows [11] and X-ray lithography masks, [12][13][14][15][16][17][18] and tribological (wear resistant) films. [19] The first reference to these materials as 'nanocrystalline' was at the Workshop on Diamond Thin Films in 1990.…”

Section: Historical Overviewmentioning

confidence: 99%

The CVD of Nanodiamond Materials

Butler

Sumant

2008

Chemical Vapor Deposition

340

261

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The growth and characteristics of nanocrystalline diamond thin films with thicknesses from 20 nm to less than 5 mm are reviewed. These materials contain between 95% and >99.9% diamond crystallites, the balance being made up from other forms of carbon. Within this class of materials there is a continuous range of composition, characteristics, and properties which depend on the nucleation and growth conditions. It is convenient to classify these films as either ultra-nanocrystalline-diamond (UNCD) or nanocrystalline-diamond (NCD) based on their microstructure, properties, and growth environment. In general, UNCD materials are composed of small particles of diamond ca. 2-5 nm in size with sp 2 -carbon bonding between the particles. UNCD is usually grown in argon-rich, hydrogen-poor CVD environments, and may contain up to 95-98% sp 3 -bonded carbon. NCD materials start with high density nucleation, initiating nanometer-sized diamond domains which grow in a columnar manner with the grain size coarsening with thickness. NCD is generally grown in carbon-lean and hydrogen-rich environments. NCD and UNCD exhibit an interesting range of physical properties which find use in X-ray windows and lithography, micro-and nanomechanical and optical resonators, tribological shaft seals and atomic force microscopy (AFM) probes, electron field emitters, platforms for chemical and DNA sensing, and many other applications.

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Section: Historical Overviewmentioning

confidence: 99%

The CVD of Nanodiamond Materials

Butler

Sumant

2008

Chemical Vapor Deposition

340

261

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“…In the late 1980s, polycrystalline diamond films with fine grains were grown for optical coatings [17,18], wear resistant coatings [19], high-pressure synchrotron X-ray windows [20] and X-ray lithography masks [21]. The first reference to these materials as 'nanocrystalline' was at the Workshop on the Science and Technology of Diamond Films in 1990 [17].…”

Section: Nanodiamond Filmsmentioning

confidence: 99%

“…The first reference to these materials as 'nanocrystalline' was at the Workshop on the Science and Technology of Diamond Films in 1990 [17]. Most of these materials would now be classified as forms of nanocrystalline diamond (NCD) and further characterized the presence of large intrinsic stress and non-diamond phases in these material [22][23][24][25].…”

Section: Nanodiamond Filmsmentioning

confidence: 99%

Nanocrystalline Diamond Films: Applications and Advances in Nanomedicine

Chen¹,

Lee²,

Chiu³

2011

Biomaterials Applications for Nanomedicine

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“…Here, the topics concerned with the laser (Ong et al 1990;Butler and Sumant 2008) 1990 Mass synthesis of C 60 Arc discharge (Haufler et al 1990) 1991 Small-quantity synthesis of La@C 82 Arc discharge (Chai et al 1991) 1991 Clear-cut discovery of MWNTs Arc discharge (Iijima 1991) 1993 Discovery of SWMTs Arc discharge (Iijima and Ichibashi 1993;Bethune et al 1993) 1994 Growth of UNCD films Microwave PECVD (Gruen et al 1994) 1996 Formation of alkali-atom@C 60 Plasma-ion irradiation Hatakeyama et al 2014) 1997 Formation of N@C 60 DC and RF discharges (Pietzak et al 1997;Cho et al 2012) 1997 Discovery of carbon nanoroses Arc discharge (Ando et al 1997) 1998 Growth of well-aligned MWNTs Hot filament PECVD (Ren et al 1998) 2001 Formation of C 60 , Cs, DNA@SWNTs…”

Section: History Of Plasma-processing Growth and Formation Of Carbon mentioning

confidence: 99%

“…At that time, diamond films so far grown by PECVD using discharge plasmas in the microwave range of frequencies were first referred to as ''nanocrystalline-diamond'' (NCD) films in the realm of nanodiamonds (NDs) (Ong et al 1990;Butler and Sumant 2008). In the mid-1990s, ultra-nanocrystallinediamond (UNCD) films consisting of NDs smaller than NCDs were grown by microwave PECVD (Gruen et al 1994), and the plasma-ion irradiation made an appearance as an effective method of forming endohedral C 60 (alkali-atom@C 60 , N@C 60 ) (Hatakeyama et al 2014;Pietzak et al 1997;Cho et al 2012).…”

Section: History Of Plasma-processing Growth and Formation Of Carbon mentioning

confidence: 99%

Nanocarbon materials fabricated using plasmas

Hatakeyama

2017

Rev. Mod. Plasma Phys.

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Since the discovery of fullerenes more than three decades ago, new kinds of nanoscale materials of carbon allotropes called ''nanocarbons'' have so far been discovered or synthesized at successive intervals as cases such as carbon nanotubes, carbon nanohorns, graphene, carbon nanowalls, and a carbon nanobelt, while nanodiamonds were actually discovered before then. Their attractively excellent mechanical, physical, and chemical properties have driven researchers to continuously create one of the hottest frontiers in materials science and technology. While plasma states have often been involved in their discovery, on the other hand, plasma-based approaches to this exciting field originally hold promising and enormous potentials for advancing and expanding industrial/biomedical applications of nanocarbons of great diversity. This article provides an extensive overview on plasma-fabricated nanocarbon materials, where the term ''fabrication'' is defined as synthesis, functionalization, and assembly of devices to cover a wide range of issues associated with the step-by-step plasma processes. Specific attention has been paid to the comparative examination between plasma-based and non-plasma methods for fabricating the nanocarobons with an emphasis on the advantages of plasma processing, such as low-temperature/large-scale fabrication and diversitycarrying structure controllability. The review ends with current challenges and prospects including a ripple effect of the nanocarbon studies on the development of related novel nanomaterials such as transition metal dichalcogenides. It contains not only the latest progress in the field for cutting-edge scientists and engineers, but also the introductory guidance to non-specialists such as lower-class graduate students.& Rikizo Hatakeyama

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Preparation of nanocrystalline diamond films for optical coating applications using a pulsed microwave plasma CVD method

Cited by 10 publications

References 0 publications

The CVD of Nanodiamond Materials

The CVD of Nanodiamond Materials

Nanocrystalline Diamond Films: Applications and Advances in Nanomedicine

Nanocarbon materials fabricated using plasmas

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