Preparation of PbTiO<sub>3</sub> Ferroelectric Thin Film by Chemical Vapor Deposition

Nakagawa, Taichi; Yamaguchi, Jiro; Okuyama, Masanori; Hamakawa, Yoshihiro

doi:10.1143/jjap.21.l655

Cited by 50 publications

(8 citation statements)

References 6 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…2(b), the Raman spectrum also shows a single phase of PbTiO 3 . 27 It is noteworthy that the film prepared in the study consists of well-crystallized particles and does not contain any impurity phases, contrary to the films prepared by previous high-temperature processes such as CVD, 4 MOCVD, 5 and sol-gel 6 methods. The scanning electron micrographs of the surface and cross section of the PbTiO 3 film are shown in Figs.…”

Section: Resultsmentioning

confidence: 86%

“…The number of PbTiO 3 nuclei and the rate of nucleation would directly affect the grain size. The nucleation is associated with C Pb ͞C Ti , the mole fraction of Pb(OH) 2 and Ti(OH) 4 , and the supersaturation of the solution. On the other hand, Lencka and Riman 33,34 have studied thermodynamical calculations to determine the reaction conditions favoring hydrothermal synthesis of PbTiO 3 powders.…”

Section: Resultsmentioning

confidence: 99%

“…Most of the films have been fabricated by either rf sputtering 3 or chemical vapor deposition (CVD). 4 However, these methods have disadvantages such as the stoichiometric change of the film composition 3 and residue of source material such as PbCl 2 in the film. 4 Furthermore, to form ferroelectric PbTiO 3 films during or after processing, they need high-temperature treatment, which causes the reaction of the film with substrate and sometimes leads to cracking and/or peeling of the film.…”

Section: Introductionmentioning

confidence: 99%

“…4 However, these methods have disadvantages such as the stoichiometric change of the film composition 3 and residue of source material such as PbCl 2 in the film. 4 Furthermore, to form ferroelectric PbTiO 3 films during or after processing, they need high-temperature treatment, which causes the reaction of the film with substrate and sometimes leads to cracking and/or peeling of the film. Metal-organic chemical vapor deposition (MOCVD) 5 and sol-gel methods 6 have also been applied to the preparation of PbTiO 3 film.…”

Section: Introductionmentioning

confidence: 99%

See 3 more Smart Citations

Hydrothermal synthesis of PbTiO₃ films

Cho

Yoshimura

1997

J. Mater. Res.

View full text Add to dashboard Cite

Well-crystallized polycrystalline films of tetragonal PbTiO 3 have been synthesized on Ti metal substrates in concentrated alkaline solutions of Pb(OH) 2 containing KOH by the hydrothermal method under saturated vapor pressure (2.0 MPa) at 200 ± C. The film microstructure depended strongly on the Pb(OH) 2 and KOH concentration. The grain size became larger from approximately 0.6 to 6 mm with an increase of KOH concentration from 1 to 4 M at 0.07 M Pb(OH) 2 , whereas the grains decreased in size with an increase of Pb(OH) 2 concentration at 1 M KOH concentration. PbTiO 3 film prepared in the aqueous solution of 0.07 M Pb(OH) 2 containing 2 M KOH showed a relative dielectric constant of about 215 and loss of about 5% at 1 kHz.

show abstract

Section: Resultsmentioning

confidence: 86%

Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Hydrothermal synthesis of PbTiO₃ films

Cho

Yoshimura

1997

J. Mater. Res.

View full text Add to dashboard Cite

show abstract

“…Many of these critical requirements have been met by breakthroughs in thin-film techniques such as r.f. sputtering [1, 2], ion plating and chemical vapour deposition [3]. Substantial progress has been achieved, especially in films deposited by r.f.…”

mentioning

confidence: 99%

Preparation and ferroelectric properties of sol-gel-derived (Pb, Ca)TiO3 thin films

Tsuzuki¹,

Murakami

Kani³

et al. 1991

J Mater Sci Lett

View full text Add to dashboard Cite

PbTiO3 is a perovskite-type compound having remarkable ferroelectric, pyroelectric and piezoelectric properties. Bulk PbTiO 3 ceramics have been used[ as both pyroelectric infrared detectors and piezoelectric transducers. Although cut and polished thick plates of dense PbTiO3 have been used for tlhe former application, the latter application involves the use of a thin deposited film of the material. In recent critical device applications it has become increasingly necessary to consider the requirements of the low operating voltage of the device in addition to the large component area and connection to many circuit elements. Many of these critical requirements have been met by breakthroughs in thin-film techniques such as r.f. sputtering [1, 2], ion plating and chemical vapour deposition [3]. Substantial progress has been achieved, especially in films deposited by r.f. sputtering: Recently it has been shown that calcium-or lanthanum-modified PbTiO3 pyroelectric films [4,5] prepared by r.f. sputtering have higher sensitivity than pure PbTiO3 films. However, there are some problems, such as the higher capital equipment costs and difficulty in achieving stoichiometry, which is due to pre, ferential sputtering of one element over the other and the different vapour pressures of the constituents.The sol-gel processing technique has the following advantages: (1) it is a simple non-vacuum chemical technique which is inexpensive; (2) it can be used for the uniform deposition of several polycomponent oxide films; and (3) the films can be deposited over a large surface area. Several ferroelectric thin films such as BaTiO3 [6], PbTiO3 [7][8][9], PZT [10] and PLZT [11] have been prepared by this process. However, the preparation of the sol-gel-derived (Pb,Ca)TiO3 system for infrared detector applications has not been reported.In this study the structural and ferroelectric properties of (Pbl_xCax)TiO 3 (0.0 ~< x ~< 0.35) films prepared by the sol-gel method were investigated. For the sample preparation, titanium isopropoxide, trihydrated lead acetate and calcium metal were used as the starting materials. Titanium isopropoxide was first diluted with 2-methoxyethanol. Trihydrated lead acetate was dissolved at 85 °C in 2-methoxyethanol and the solution was subsequently boiled to remover water. The dehydrated solution was cooled to room temperature. Calcium alkoxide solution, ]however, was prepared by the direct reaction of calcium metal with dry ethanol. The 0261-8028/9'1 $03.00 + .12 ©1991 Chapman and Hall Ltd. mixed solutions with the desired composition were refluxed at 120 °C in flowing nitrogen to promote complexation, and the by-products (e.g. alkylacetates) of the reaction were removed by subsequent distillation. The Pb-Ca-Ti precursor solutions were then concentrated to 0.25 to 0.4 moll -1 by vacuum distillation. Inductively coupled plasma (ICP) emission spectrochemical analysis was used to confirm that the deviation from stoichiometry was within + 1 mol %.Thin films were deposited on fused silica and platinum substrates b...

show abstract