Preparation of piezoelectric 0.1Pb(Zn0.5W0.5)O3–0.9Pb(Zr0.5Ti0.5)O3 solid solution and thick films for low temperature firing on a Si-substrate

Kwon, Taeyun; Park, Jae Hong; Kim, Yong Bum; Yoon, Dae Sung; Cheon, Chae Il; Lee, Hong Lim; Kim, Tae Song

doi:10.1016/j.jcrysgro.2006.07.005

Cited by 16 publications

(21 citation statements)

References 24 publications

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“…Herein, the piezoelectric layer plays the role on actuating the cantilever, while the substrate layer is used for nano-or micro-patterning. Recently, Kwon et al [77,78] developed a novel piezoelectric thick film, i.e. a 0.1Pb(Zn 0.5 W 0.5 )O 3 -0.9Pb(Zr 0.5 Ti 0.5 )O 3 (PZW-PZT) thick film, that allows the actuation of micro devices with large actuation forces.…”

Section: Resonance Of Piezoelectric Microcantilevermentioning

confidence: 99%

Nanomechanical resonators and their applications in biological/chemical detection: Nanomechanics principles

et al. 2011

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Recent advances in nanotechnology have led to the development of nano-electro-mechanical systems (NEMS) such as nanomechanical resonators, which have recently received significant attention from the scientific community. This has not only been for their capability for the label-free detection of bio/chemical-molecules at single-molecule (or atomic) resolution for future applications such as the early diagnostics of diseases such as cancer, but also for their unprecedented ability to detect physical quantities such as molecular weight, elastic stiffness, surface stress, and surface elastic stiffness for adsorbed molecules on the surface. Most experimental works on resonator-based molecular detection have been based on the principle that molecular adsorption onto a resonator surface increases the effective mass, and consequently decreases the resonant frequencies of the nanomechanical resonator. However, this principle is insufficient to provide fundamental insights into resonator-based molecular detection at the nanoscale; this is due to recently proposed novel nanoscale detection principles including various effects such as surface effects, nonlinear oscillations, coupled resonance, and stiffness effects. Furthermore, these effects have only recently been incorporated into existing physical models for resonators, and therefore the universal physical principles governing nanoresonator-based detection have not been completely described. Therefore, our objective in this review is to overview the current attempts to understand the underlying mechanisms in nanoresonator-based detection using physical models coupled to computational simulations and/or experiments. Specifically, we will focus on issues of special relevance to the dynamic behavior of nanoresonators and their applications in biological/chemical detection: the resonance behavior of micro/nano-resonators; resonator-based chemical/biological detection; physical models of various nanoresonators such as nanowires, carbon nanotubes, and graphene. We pay particular attention to experimental and computational approaches that have been useful in elucidating the mechanisms underlying the dynamic behavior of resonators across multiple and disparate spatial/length scales, and the resulting insight into resonator-based detection that has been obtained. We additionally provide extensive discussion regarding potentially fruitful future research directions coupling experiments and simulations in order to develop a fundamental understanding of the basic physical principles that govern NEMS and NEMS-based sensing and detection applications.

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Section: Resonance Of Piezoelectric Microcantilevermentioning

confidence: 99%

Nanomechanical resonators and their applications in biological/chemical detection: Nanomechanics principles

et al. 2011

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“…In order to obtain a fully dense film from a green thick film, a high sintering temperature and sufficient sintering time are considered as essential requirements. According to previous works, an almost fully dense PZT bulk sample is obtained under special conditions of a sintering temperature of approximately 1250°C and a sintering time of more than 2 h [1, [3][4][5]9]. Accordingly, PZT is seemingly incompatible with Si substrates because the melting point of Si (~1400°C) [1,2,9], controlling the particle size, and applying sol infiltration enhancement into the powder [8,9].…”

Section: Properties Of the Active Materials And Thick Film Cantileversmentioning

confidence: 99%

“…Nonetheless, the resonance and sensing properties of PZT thick film cantilever devices using resonance behavior have rarely been studied before, because not only the processing temperature of the PZT thick film is high enough to generate PbO condensation and reaction to undesirable glassy phase, but also micro-patterning using the etching process of PZT thick film is not easy or desirable [1][2][3][4][5][6][7][8][9].…”

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“…In order to overcome these problems, some researchers have suggested that the screen printing method is capable of achieving reliable micro-dimension patterning and thickness over a range from several microns to tens of microns as just one drawing of PZT paste, and also that several other methods can realize the sintering of PZT at a low temperature [3,5,[7][8][9]. As far as screen printing is concerned, unfortunately, complete densification cannot be obtained by screen printing alone because the PZT paste is deposited through the screen mesh and extra pressing processes are not appropriate to maintain the micro pattern.…”

mentioning

confidence: 99%

“…Accordingly, some methods that incorporate the screen printing method have been explored to increase the density of thick films. Those methods include the development of new piezoelectric materials, development of proper milling and mixing methods, addition of glass frit, and sol infiltration into the thick film [3][4][5][6][7][8][9].…”

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Effects of the material properties on piezoelectric PZT thick film micro cantilevers as sensors and self actuators

et al. 2009

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In general, PZT thick films fabricated through screen printing show porosity ranging from 10% to 40%. Unfortunately, these high porosities of thick films greatly affect the electromechanical characteristics of PZT thick film cantilevers. In this paper, we report a systematic analysis on the effect of thick film porosity on the electromechanical characteristics of the PZT thick film cantilevers in order to make the PZT thick film cantilever a highly controllable micro mass sensor or micro self actuator. The theoretical calculations of mass sensitivity and actuating force of the optimal PZT thick film cantilevers are presented with respect to the material properties and geometry of PZT thick films, which are based on experimentally verified material properties and geometrical parameters. The 400×300 cantilever with 20% porosity of active material was evaluated to be reliable as an optimal mass sensor and self actuator. The thick film cantilever indicates both high mass sensitivity (~48 pg/Hz), the same as sensitive thin film cantilever sensors, and high actuating force (~1.7 N), similar to strong bulk cantilevers. From the results of the modeling, it was found that the harmonic oscillation response according to material properties including the porosity, and geometry of the fabricated thick film cantilever, is quite controllable and predictable, thus enhancing the actuating force and mass sensitivity. Also, it was confirmed that controlling the porosity of PZT thick films is more efficient than controlling the cantilever geometry to increase the cantilever resonating force. However, optimizing the geometric constituents is more effective than controlling the densification of PZT thick films to increase the mass sensitivity of the cantilevers.

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Composite Film Processing

Dorey

Roy

Sharma

et al. 2013

Chemical Solution Deposition of Functional Oxide Thin Films

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Preparation of piezoelectric 0.1Pb(Zn0.5W0.5)O3–0.9Pb(Zr0.5Ti0.5)O3 solid solution and thick films for low temperature firing on a Si-substrate

Cited by 16 publications

References 24 publications

Nanomechanical resonators and their applications in biological/chemical detection: Nanomechanics principles

Nanomechanical resonators and their applications in biological/chemical detection: Nanomechanics principles

Effects of the material properties on piezoelectric PZT thick film micro cantilevers as sensors and self actuators

Composite Film Processing

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