1997
DOI: 10.1116/1.589488
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Preparation of probe tips with well-defined spherical apexes for quantitative scanning force spectroscopy

Abstract: A method for the preparation of scanning force microscopy (SFM) tips with spherically shaped tip apexes and known tip radii by exposing commercially available silicon cantilevers to the electron beam of a transmission electron microscope is presented. The spherical shape of the tip apexes was achieved by growth of a contamination layer at the end of the tip using the electron-beam deposition process. Well-defined radii between 7 and 120 nm could be produced. The importance of such tips for quantitative SFM mea… Show more

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Cited by 13 publications
(4 citation statements)
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“…Single-asperity friction forces obtained with an AFM are proportional to the true contact area if the friction is dominated by interfacial friction, the shear strength of the interface is constant, and the contact pairs are isotropic linearly elastic materials. 41,43,45,50,51,88,89 In these cases, the friction varies with load in a nonlinear way. In contrast, the friction of alkanephosphonic acid SAMs varied linearly with load.…”
Section: Discussionmentioning
confidence: 99%
“…Single-asperity friction forces obtained with an AFM are proportional to the true contact area if the friction is dominated by interfacial friction, the shear strength of the interface is constant, and the contact pairs are isotropic linearly elastic materials. 41,43,45,50,51,88,89 In these cases, the friction varies with load in a nonlinear way. In contrast, the friction of alkanephosphonic acid SAMs varied linearly with load.…”
Section: Discussionmentioning
confidence: 99%
“…Quantitative nanotribology measurements were obtained with two different probe tips with curved apexes with radii of 45 ± 3 and 150 ± 10 nm. The tips were formed by coating the tips of tungsten carbide-coated silicon cantilever probes (MikroMasch, Wilsonville, OR) with a smooth hydrogenated amorphous carbon film using electron beam induced decomposition (EBID) in a transmission electron microscope (TEM). , This process forms a dense hydrocarbon coating on the tip, but the exact composition and hybridizations of the carbon atoms are not known. Both tips were imaged at high resolution by TEM before and after the AFM experiments to measure tip shape and radius and to determine the extent to which the tip may have changed during the experiment.…”
Section: Methodsmentioning
confidence: 99%
“…Optical microscopy was used to measure the in-plane dimensions of the lever, namely, length and width, and transmission electron microscopy (TEM) was used to measure the small critical dimensions of the cantilevers, such as tip radius, tip height, and lever thickness. The tip shape was determined using TEM. TEM images were taken using either a JEOL 100CX or a JEOL 200CX (Tokyo, Japan), with resolution for high-magnification tip images of approximately 3 nm. The radius of the tip was determined by a fitting a circle to the end of the tip.…”
Section: Methodsmentioning
confidence: 99%