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The analysis of lateral force microscopy experiments is discussed with emphasis on calibration issues and the statistical treatment of the original data in order to obtain reliable quantitative results. This includes an extensive discussion about the statistical and systematical errors which have to be considered if experimental results obtained under different experimental conditions (such as different cantilevers, samples, humidities, with or without lubricant, etc.) have to be compared. The proposed data analysis procedure is exemplified using data acquired on germanium sulfide and highly oriented pyrolytic graphite.

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A method for the preparation of scanning force microscopy (SFM) tips with spherically shaped tip apexes and known tip radii by exposing commercially available silicon cantilevers to the electron beam of a transmission electron microscope is presented. The spherical shape of the tip apexes was achieved by growth of a contamination layer at the end of the tip using the electron-beam deposition process. Well-defined radii between 7 and 120 nm could be produced. The importance of such tips for quantitative SFM measurements is discussed. Topographical measurements on a special test sample are shown as well as measurements of the frictional force as a function of the loading force as an example for quantitative spectroscopical measurements.